发明申请
- 专利标题: COMPOSITIONS AND METHODS FOR REMOVING ORGANIC SUBSTANCES
- 专利标题(中): 用于去除有机物质的组合物和方法
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申请号: US12413085申请日: 2009-03-27
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公开(公告)号: US20100242998A1公开(公告)日: 2010-09-30
- 发明人: Michael Wayne Quillen , Dale Edward O'Dell , Zachary Philip Lee , John Cleaon Moore
- 申请人: Michael Wayne Quillen , Dale Edward O'Dell , Zachary Philip Lee , John Cleaon Moore
- 申请人地址: US TN Kingsport
- 专利权人: Eastman Chemical Company
- 当前专利权人: Eastman Chemical Company
- 当前专利权人地址: US TN Kingsport
- 主分类号: B08B3/08
- IPC分类号: B08B3/08 ; G03F7/42
摘要:
Compositions and methods useful for the removal of organic substances from substrates, for example, electronic device substrates such as microelectronic wafers or flat panel displays, are provided. A method is presented which applies a minimum volume of the composition as a coating to the inorganic substrate whereby sufficient heat is added and immediately rinsed with water to achieve complete removal. These compositions and methods are particularly suitable for removing and completely dissolving photoresists of the positive and negative varieties as well as thermoset polymers from electronic devices.
公开/授权文献
- US08444768B2 Compositions and methods for removing organic substances 公开/授权日:2013-05-21
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