COMPOSITIONS AND METHODS FOR REMOVING ORGANIC SUBSTANCES
    2.
    发明申请
    COMPOSITIONS AND METHODS FOR REMOVING ORGANIC SUBSTANCES 失效
    用于去除有机物质的组合物和方法

    公开(公告)号:US20100242998A1

    公开(公告)日:2010-09-30

    申请号:US12413085

    申请日:2009-03-27

    IPC分类号: B08B3/08 G03F7/42

    摘要: Compositions and methods useful for the removal of organic substances from substrates, for example, electronic device substrates such as microelectronic wafers or flat panel displays, are provided. A method is presented which applies a minimum volume of the composition as a coating to the inorganic substrate whereby sufficient heat is added and immediately rinsed with water to achieve complete removal. These compositions and methods are particularly suitable for removing and completely dissolving photoresists of the positive and negative varieties as well as thermoset polymers from electronic devices.

    摘要翻译: 提供了可用于从基底去除有机物质的组合物和方法,例如电子器件基底如微电子晶片或平板显示器。 提出了一种方法,其将组合物的最小体积作为涂层施加到无机基底上,由此添加足够的热量并立即用水冲洗以实现完全去除。 这些组合物和方法特别适用于从电子装置中除去和完全溶解正极和负极品种的光致抗蚀剂以及热固性聚合物。