Invention Application
US20100244147A1 Configuration and fabrication of semiconductor structure having asymmetric field-effect transistor with tailored pocket portions along source/drain zone
有权
具有不对称场效应晶体管的半导体结构的配置和制造,沿着源/漏区具有定制的口袋部分
- Patent Title: Configuration and fabrication of semiconductor structure having asymmetric field-effect transistor with tailored pocket portions along source/drain zone
- Patent Title (中): 具有不对称场效应晶体管的半导体结构的配置和制造,沿着源/漏区具有定制的口袋部分
-
Application No.: US12382967Application Date: 2009-03-27
-
Publication No.: US20100244147A1Publication Date: 2010-09-30
- Inventor: Jeng-Jiun Yang , Constantin Bulucea , Sandeep R. Bahl
- Applicant: Jeng-Jiun Yang , Constantin Bulucea , Sandeep R. Bahl
- Assignee: National Semiconductor Corporation
- Current Assignee: National Semiconductor Corporation
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/336

Abstract:
An asymmetric insulated-gate field effect transistor (100U or 102U) provided along an upper surface of a semiconductor body contains first and second source/drain zones (240 and 242 or 280 and 282) laterally separated by a channel zone (244 or 284) of the transistor's body material. A gate electrode (262 or 302) overlies a gate dielectric layer (260 or 300) above the channel zone. A pocket portion (250 or 290) of the body material more heavily doped than laterally adjacent material of the body material extends along largely only the first of the S/D zones and into the channel zone. The vertical dopant profile of the pocket portion is tailored to reach a plurality of local maxima (316-1-316-3) at respective locations (PH-1-PH-3) spaced apart from one another. The tailoring is typically implemented so that the vertical dopant profile of the pocket portion is relatively flat near the upper semiconductor surface. As a result, the transistor has reduced leakage current.
Public/Granted literature
Information query
IPC分类: