Invention Application
- Patent Title: Structure and fabrication of like-polarity field-effect transistors having different configurations of source/drain extensions, halo pockets, and gate dielectric thicknesses
- Patent Title (中): 具有不同构造的源极/漏极延伸部分,晕圈和栅介质厚度的类似极性场效应晶体管的结构和制造
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Application No.: US12382971Application Date: 2009-03-27
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Publication No.: US20100244149A1Publication Date: 2010-09-30
- Inventor: Constantin Bulucea , William D. French , Donald M. Archer , Jeng-Jiun Yang , Sandeep R. Bahl , D. Courtney Parker
- Applicant: Constantin Bulucea , William D. French , Donald M. Archer , Jeng-Jiun Yang , Sandeep R. Bahl , D. Courtney Parker
- Assignee: National Semiconductor Corporation
- Current Assignee: National Semiconductor Corporation
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/336

Abstract:
A group of high-performance like-polarity insulated-gate field-effect transistors (100, 108, 112, 116, 120, and 124 or 102, 110, 114, 118, 122, and 126) have selectably different configurations of lateral source/drain extensions, halo pockets, and gate dielectric thicknesses suitable for a semiconductor fabrication platform that provides a wide variety of transistors for analog and/or digital applications. Each transistor has a pair of source/drain zones, a gate dielectric layer, and a gate electrode. Each source/drain zone includes a main portion and a more lightly doped lateral extension. The lateral extension of one of the source/drain zones of one of the transistors is more heavily doped or/and extends less deeply below the upper semiconductor surface than the lateral extension of one of the source/drain zones of another of the transistors.
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Information query
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