发明申请
US20100245475A1 INKJET PRINT HEAD AND METHOD THEREFOR 有权
INKJET打印头及其方法

INKJET PRINT HEAD AND METHOD THEREFOR
摘要:
An inkjet print head is fabricated by, fist, forming an electrode and two layers of a protection film composed of an inorganic insulating film and an organic insulating film over the electrode within a groove of a piezoelectric member, adhering a top board to the piezoelectric member covering the groove to form a pressure chamber, adhering a polyimide plate so as to cover the groove, and then forming a nozzle in the polyimide plate by the excimer laser processing aligning to the pressure chamber. Herein, the excimer laser light penetrates the polyimide plate to form a nozzle, and further proceeds to be emitted on the organic insulating film. Consequently, the part of the organic insulating film irradiated by the laser light is damaged. To prevent the damage of the organic insulating film, the thickness of the inorganic insulating film in the part to which the excimer laser light is emitted is prepared to be 0.5 μm or more.
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