发明申请
- 专利标题: INKJET PRINT HEAD AND METHOD THEREFOR
- 专利标题(中): INKJET打印头及其方法
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申请号: US12689199申请日: 2010-01-18
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公开(公告)号: US20100245475A1公开(公告)日: 2010-09-30
- 发明人: Seki Masashi , Ryutaro Kusunoki , Chiaki Tanuma
- 申请人: Seki Masashi , Ryutaro Kusunoki , Chiaki Tanuma
- 申请人地址: JP Tokyo
- 专利权人: Toshiba Tec Kabushiki Kaisha
- 当前专利权人: Toshiba Tec Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-10602 20090121; JP2009-148355 20090623
- 主分类号: B41J2/135
- IPC分类号: B41J2/135 ; B23P17/00 ; B23K26/00
摘要:
An inkjet print head is fabricated by, fist, forming an electrode and two layers of a protection film composed of an inorganic insulating film and an organic insulating film over the electrode within a groove of a piezoelectric member, adhering a top board to the piezoelectric member covering the groove to form a pressure chamber, adhering a polyimide plate so as to cover the groove, and then forming a nozzle in the polyimide plate by the excimer laser processing aligning to the pressure chamber. Herein, the excimer laser light penetrates the polyimide plate to form a nozzle, and further proceeds to be emitted on the organic insulating film. Consequently, the part of the organic insulating film irradiated by the laser light is damaged. To prevent the damage of the organic insulating film, the thickness of the inorganic insulating film in the part to which the excimer laser light is emitted is prepared to be 0.5 μm or more.
公开/授权文献
- US08469489B2 Inkjet print head and method therefor 公开/授权日:2013-06-25