发明申请
- 专利标题： ALUMINA SINTERED BODY, METHOD FOR MANUFACTURING THE SAME, AND SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER
- 专利标题（中）： 铝氧化物烧结体，其制造方法以及半导体制造装置
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申请号： US12722773申请日： 2010-03-12
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公开(公告)号： US20100248935A1公开(公告)日： 2010-09-30
- 发明人: Naomi Teratani , Toru Hayase , Yuji Katsuda , Masahiro Kida
- 申请人： Naomi Teratani , Toru Hayase , Yuji Katsuda , Masahiro Kida
- 申请人地址： JP Nagoya-City
- 专利权人： NGK Insulators, Ltd.
- 当前专利权人： NGK Insulators, Ltd.
- 当前专利权人地址： JP Nagoya-City
- 优先权： JP2009-077266 20090326; JP2009-200753 20090831; JP2010-010001 20100120
- 主分类号： C04B35/03
- IPC分类号： C04B35/03 ; B29C47/76
摘要：
A method for manufacturing an alumina sintered body of the present invention comprises: (a) forming a mixed powder containing at least Al2O3 and MgF2 or a mixed powder containing Al2O3, MgF2, and MgO into a compact having a predetermined shape; and (b) performing hot-press sintering of the compact in a vacuum atmosphere or a non-oxidizing atmosphere to form an alumina sintered body, in which when a amount of MgF2 to 100 parts by weight of Al2O3 is represented by X (parts by weight), and a hot-press sintering temperature is represented by Y (° C.), the hot-press sintering temperature is set to satisfy the following equations (1) to (4) 1,120≦Y≦1,300 (1) 0.15≦X≦1.89 (2) Y≦−78.7X+1,349 (3) Y≧−200X+1,212 (4).
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