发明申请
US20100258749A1 SYSTEM, METHOD AND APPARATUS FOR LASER PRODUCED PLASMA EXTREME ULTRAVIOLET CHAMBER WITH HOT WALLS AND COLD COLLECTOR MIRROR
有权
用于激光生产的等离子体超紫外线室的系统，方法和装置，具有热水和冷收集器
- 专利标题： SYSTEM, METHOD AND APPARATUS FOR LASER PRODUCED PLASMA EXTREME ULTRAVIOLET CHAMBER WITH HOT WALLS AND COLD COLLECTOR MIRROR
- 专利标题（中）： 用于激光生产的等离子体超紫外线室的系统，方法和装置，具有热水和冷收集器
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申请号： US12725167申请日： 2010-03-16
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公开(公告)号： US20100258749A1公开(公告)日： 2010-10-14
- 发明人: William N. Partlo , Igor V. Fomenkov
- 申请人： William N. Partlo , Igor V. Fomenkov
- 主分类号： H05G2/00
- IPC分类号： H05G2/00
摘要：
A system and method for an extreme ultraviolet light chamber comprising a collector mirror, a cooling system coupled to a backside of the collector mirror operative to cool a reflective surface of the collector mirror and a buffer gas source coupled to the extreme ultraviolet light chamber.
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