发明申请
US20100258888A1 High performance MTJ element for STT-RAM and method for making the same
有权
用于STT-RAM的高性能MTJ元件和制作相同的方法
- 专利标题: High performance MTJ element for STT-RAM and method for making the same
- 专利标题(中): 用于STT-RAM的高性能MTJ元件和制作相同的方法
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申请号: US12803189申请日: 2010-06-21
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公开(公告)号: US20100258888A1公开(公告)日: 2010-10-14
- 发明人: Cheng T. Horng , Ru-Ying Tong , Chyu-Jiuh Torng , Witold Kula
- 申请人: Cheng T. Horng , Ru-Ying Tong , Chyu-Jiuh Torng , Witold Kula
- 专利权人: MagIC Technologies, Inc.
- 当前专利权人: MagIC Technologies, Inc.
- 主分类号: H01L29/82
- IPC分类号: H01L29/82
摘要:
An STT-MTJ MRAM cell that utilizes transfer of spin angular momentum as a mechanism for changing the magnetic moment direction of a free layer. The device includes an IrMn pinning layer, a SyAP pinned layer, a naturally oxidized, crystalline MgO tunneling barrier layer that is formed on an Ar-ion plasma smoothed surface of the pinned layer and, in one embodiment, a free layer that comprises an amorphous layer of Co60Fe20B20. of approximately 20 angstroms thickness formed between two crystalline layers of Fe of 3 and 6 angstroms thickness respectively. The free layer is characterized by a low Gilbert damping factor and by very strong polarizing action on conduction electrons. The resulting cell has a low critical current, a high dR/R and a plurality of such cells will exhibit a low variation of both resistance and pinned layer magnetization angular dispersion.
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