发明申请
US20100269898A1 METHOD FOR MANUFACTURING PHOTOVOLTAIC CELL AND PHOTOVOLTAIC CELL
审中-公开
制造光伏电池和光电池的方法
- 专利标题： METHOD FOR MANUFACTURING PHOTOVOLTAIC CELL AND PHOTOVOLTAIC CELL
- 专利标题（中）： 制造光伏电池和光电池的方法
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申请号： US12810060申请日： 2008-12-24
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公开(公告)号： US20100269898A1公开(公告)日： 2010-10-28
- 发明人: Hirohisa Takahashi , Satoru Ishibashi
- 申请人： Hirohisa Takahashi , Satoru Ishibashi
- 申请人地址： JP Chigasaki-shi
- 专利权人： ULVAC, INC.
- 当前专利权人： ULVAC, INC.
- 当前专利权人地址： JP Chigasaki-shi
- 优先权： JPP2007-339534 20071228
- 国际申请： PCT/JP2008/073399 WO 20081224
- 主分类号： H01L31/02
- IPC分类号： H01L31/02 ; H01L31/18
摘要：
A method for manufacturing a photovoltaic cell that is provided with an upper electrode that is arranged on the light incoming side and functions as a power extraction electrode, the method including the step of: forming the upper electrode on a substrate by sputtering using a target that contains a zinc oxide-based material, wherein in the step of forming the upper electrode, the sputtering is performed in an atmosphere that contains two or three selected from a group consisting of hydrogen gas, oxygen gas, and water vapor.
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