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1.发明授权公开(公告)号：US08420436B2
公开(公告)日：2013-04-16
申请号：US13126108
申请日：2009-10-27
Applicant: Hirohisa Takahashi , Satoru Ishibashi , Sadayuki Ukishima , Masahide Matsubara , Satoshi Okabe
Inventor： Hirohisa Takahashi , Satoru Ishibashi , Sadayuki Ukishima , Masahide Matsubara , Satoshi Okabe
IPC: H01L31/0236
CPC classification number: H01L31/022466 , C23C14/086 , C23C14/5853 , C23C14/5873 , H01L31/022483 , H01L31/02366 , H01L31/076 , H01L31/18 , H01L31/1884 , Y02E10/548
Abstract: A solar cell manufacturing method according to the present invention is a solar cell manufacturing method that forms a transparent conductive film of ZnO as an electric power extracting electrode on a light incident side, the method comprises at least in a following order: a process A forming the transparent conductive film on a substrate by applying a sputtering voltage to sputter a target made of a film formation material for the transparent conductive film; a process B forming a texture on a surface of the transparent conductive film; a process C cleaning the surface of the transparent conductive film on which the texture has been formed using an UV/ozone; and a process D forming an electric power generation layer on the transparent conductive film.
Abstract translation: 根据本发明的太阳能电池制造方法是在光入射侧形成作为电力提取电极的ZnO的透明导电膜的太阳能电池制造方法，该方法至少按以下顺序形成：工艺A形成 通过施加溅射电压溅射由用于透明导电膜的成膜材料制成的靶的衬底上的透明导电膜; 在透明导电膜的表面上形成纹理的工艺B; 使用UV /臭氧清洗其上已形成纹理的透明导电膜的表面的工艺C; 以及在透明导电膜上形成发电层的工艺D。
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公开(公告)号：US20120055788A1
公开(公告)日：2012-03-08
申请号：US13297920
申请日：2011-11-16
Applicant: Hirohisa TAKAHASHI , Sadayuki Ukishima , Atsushi Ota , Noriaki Tani , Satoru Ishibashi
Inventor： Hirohisa TAKAHASHI , Sadayuki Ukishima , Atsushi Ota , Noriaki Tani , Satoru Ishibashi
CPC classification number: C23C14/3414 , C23C14/086 , C23C14/5806
Abstract: A transparent electroconductive film having a low resistivity is provided. In a film-forming method of the present invention, a transparent electroconductive film is formed on a surface of a substrate by sputtering, in a vacuum atmosphere, a target in which ZnO is a main component and Al2O3 and TiO2 are added to ZnO, and then the transparent electroconductive film is annealed by the heating thereof at a temperature of 250° C. or more and 400° C. or less. The resistivity of the obtained transparent electroconductive film is reduced because the film has ZnO as the main component and Al and Ti added therein. The transparent electroconductive film formed by the present invention is suitable as a transparent electrode for the FDP, etc.
Abstract translation: 提供具有低电阻率的透明导电膜。 在本发明的成膜方法中，在真空气氛中，通过溅射在基板的表面上形成透明导电膜，其中ZnO作为主要成分，并将Al 2 O 3和TiO 2加入到ZnO中， 然后通过在250℃以上且400℃以下的温度下的加热对透明导电膜进行退火。 所得到的透明导电膜的电阻率降低，因为膜以ZnO为主要成分，并添加了Al和Ti。 由本发明形成的透明导电膜适合作为FDP等的透明电极。
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公开(公告)号：US20110272021A1
公开(公告)日：2011-11-10
申请号：US13145225
申请日：2010-01-21
Applicant: Hirohisa Takahashi , Satoru Ishibashi , Tatsumi Usami , Masanori Shirai , Michio Akiyama
Inventor： Hirohisa Takahashi , Satoru Ishibashi , Tatsumi Usami , Masanori Shirai , Michio Akiyama
IPC: H01L31/0232 , H01L31/18 , H01L31/0224
CPC classification number: H01L31/1884 , H01L31/022483 , H01L31/03762 , H01L31/206 , Y02E10/548 , Y02P70/521
Abstract: A manufacturing method of a solar cell including a transparent conductive film formed on a transparent substrate includes the steps of: preparing a target, the target including ZnO and a material including a substance including an Al or a Ga, the ZnO being a primary component of the target; in a first atmosphere including a process gas, applying a sputter electric voltage to the target and forming a first layer included in the transparent conductive film; in a second atmosphere including a greater amount of an oxygen gas compared to the first atmosphere, applying a sputter electric voltage to the target and forming a second layer on the first layer, the second layer being included in the transparent conductive film; and forming an irregular shape by performing an etching process on the transparent conductive film.
Abstract translation: 包括形成在透明基板上的透明导电膜的太阳能电池的制造方法包括以下步骤：制备靶，包括ZnO的靶和包含Al或Ga的物质的材料，所述ZnO为主要成分 目标; 在包括处理气体的第一气氛中，向所述靶施加溅射电压并形成包含在所述透明导电膜中的第一层; 在与所述第一气氛相比含有较多量的氧气的第二气氛中，向所述靶施加溅射电压并在所述第一层上形成第二层，所述第二层包含在所述透明导电膜中; 并通过对透明导电膜进行蚀刻处理而形成不规则形状。
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4.发明申请公开(公告)号：US20110256659A1
公开(公告)日：2011-10-20
申请号：US13126108
申请日：2009-10-27
Applicant: Hirohisa Takahashi , Satoru Ishibashi , Sadayuki Ukishima , Masahide Matsubara , Satoshi Okabe
Inventor： Hirohisa Takahashi , Satoru Ishibashi , Sadayuki Ukishima , Masahide Matsubara , Satoshi Okabe
IPC: H01L31/0236 , C23C16/00
CPC classification number: H01L31/022466 , C23C14/086 , C23C14/5853 , C23C14/5873 , H01L31/022483 , H01L31/02366 , H01L31/076 , H01L31/18 , H01L31/1884 , Y02E10/548
Abstract: A solar cell manufacturing method according to the present invention is a solar cell manufacturing method that forms a transparent conductive film of ZnO as an electric power extracting electrode on a light incident side, the method comprises at least in a following order: a process A forming the transparent conductive film on a substrate by applying a sputtering voltage to sputter a target made of a film formation material for the transparent conductive film; a process B forming a texture on a surface of the transparent conductive film; a process C cleaning the surface of the transparent conductive film on which the texture has been formed using an UV/ozone; and a process D forming an electric power generation layer on the transparent conductive film.
Abstract translation: 根据本发明的太阳能电池制造方法是在光入射侧形成作为电力提取电极的ZnO的透明导电膜的太阳能电池制造方法，该方法至少按以下顺序形成：工艺A形成 通过施加溅射电压溅射由用于透明导电膜的成膜材料制成的靶的衬底上的透明导电膜; 在透明导电膜的表面上形成纹理的工艺B; 使用UV /臭氧清洗其上已形成纹理的透明导电膜的表面的工艺C; 以及在透明导电膜上形成发电层的工艺D。
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公开(公告)号：US20110189817A1
公开(公告)日：2011-08-04
申请号：US13124529
申请日：2009-10-15
Applicant: Hirohisa Takahashi , Satoru Ishibashi , Kyuzo Nakamura
Inventor： Hirohisa Takahashi , Satoru Ishibashi , Kyuzo Nakamura
IPC: H01L31/18
CPC classification number: H01L31/02366 , H01L31/022466 , H01L31/1884 , Y02E10/50
Abstract: A manufacturing method for a solar cell including an upper electrode extracting an electrode at an incident light side, the upper electrode including a transparent conductive film, a basic structural element of the transparent conductive film being any one of an indium (In), a zinc (Zn), and tin (Sn), the manufacturing method including: a step A forming a texture on a front surface of a transparent substrate using a wet etching method, the transparent conductive film being formed on the transparent substrate, wherein in the step A, when the texture is formed, a metal thin film is formed on the transparent substrate, and an anisotropic etching is performed with the metal thin film being a mask.
Abstract translation: 一种太阳能电池的制造方法，其特征在于，包括在入射光侧提取电极的上部电极，所述上部电极包括透明导电膜，所述透明导电膜的基本结构元素为铟（In），锌 （Zn）和锡（Sn），所述制造方法包括：步骤A，其使用湿式蚀刻方法在透明基板的正面上形成纹理，所述透明导电膜形成在所述透明基板上，其中，在所述工序 如图A所示，当形成纹理时，在透明基板上形成金属薄膜，以金属薄膜为掩模进行各向异性蚀刻。
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Patent Agency Ranking
公开(公告)号：US20110108114A1
公开(公告)日：2011-05-12
申请号：US12933332
申请日：2009-06-11
Applicant: Yusuke Mizuno , Hirohisa Takahashi , Sadayuki Ukishima , Takashi Komatsu , Satoru Ishibashi
Inventor： Yusuke Mizuno , Hirohisa Takahashi , Sadayuki Ukishima , Takashi Komatsu , Satoru Ishibashi
IPC: H01L31/0264 , H01L31/04 , H01L31/18
CPC classification number: H01L31/022425 , H01L31/056 , Y02E10/52
Abstract: This solar cell has: a light transmissive first electrode; a photoelectric conversion layer formed of silicon; a light transmissive buffer layer; and a second electrode formed of a light reflective alloy. The second electrode is formed of a silver alloy including silver (Ag) as a main component with at least one of tin (Sn) and gold (Au) contained therein.
Abstract translation: 该太阳能电池具有：透光的第一电极; 由硅形成的光电转换层; 透光缓冲层; 以及由光反射合金形成的第二电极。 第二电极由包含银（Ag）作为主要成分的银合金形成，其中包含锡（Sn）和金（Au）中的至少一种。
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公开(公告)号：US20090134014A1
公开(公告)日：2009-05-28
申请号：US12359694
申请日：2009-01-26
Applicant: Hirohisa Takahashi , Sadayuki Ukishima , Atsushi Ota , Noriaki Tani , Satoru Ishibashi
Inventor： Hirohisa Takahashi , Sadayuki Ukishima , Atsushi Ota , Noriaki Tani , Satoru Ishibashi
IPC: C23C14/34
CPC classification number: C23C14/086 , C01G9/00 , C01G9/02 , C01P2002/50 , C01P2004/62 , C01P2006/40 , C01P2006/60 , C23C14/3414
Abstract: A transparent electroconductive film having a low resistivity is provided. In a film-forming method of the present invention, a transparent electroconductive film is formed on a surface of a substrate by sputtering, in a vacuum atmosphere, a target in which ZnO is a main component and Al2O3 and B2O3 are added, and then the transparent electroconductive film is annealed by the heating thereof at a temperature of 300° C. or more and 400° C. or less. The resistivity of the obtained transparent electroconductive film is reduced because the film has ZnO as the main component and Al and B added thereto. The transparent electroconductive film formed by the present invention is suitable as a transparent electrode for the FDP, etc.
Abstract translation: 提供具有低电阻率的透明导电膜。 在本发明的成膜方法中，在真空气氛中，通过溅射在基板的表面上形成透明导电膜，其中添加有ZnO作为主要成分并添加Al2O3和B2O3的靶，然后， 透明导电膜通过在300℃以上且400℃以下的温度下的加热进行退火。 所得到的透明导电膜的电阻率降低，因为膜以ZnO为主要成分，并添加了Al和B。 由本发明形成的透明导电膜适合作为FDP等的透明电极。
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公开(公告)号：US5894874A
公开(公告)日：1999-04-20
申请号：US884647
申请日：1997-06-27
Applicant: Toshio Yamagiwa , Hirohisa Takahashi , Kengo Nakayama , Katsutoshi Yamazaki
Inventor： Toshio Yamagiwa , Hirohisa Takahashi , Kengo Nakayama , Katsutoshi Yamazaki
CPC classification number: B60C17/06 , B60C17/065 , B60C17/066 , B60C19/002 , B60C5/002 , Y10T152/10405 , Y10T152/10441 , Y10T152/10567
Abstract: A tube or tubeless tire, which can be punctured and still allow a vehicle to continue running, includes a plurality of spherical members formed of foamed rubber or foamed urethane. The spherical members are contained inside an air chamber of the tire and occupy 50% to 80% of the volume of the air chamber of an inflated tire.
Abstract translation: 可以穿刺并仍允许车辆继续行驶的管或无内胎轮胎包括由发泡橡胶或泡沫聚氨酯形成的多个球形构件。 球形构件容纳在轮胎的气室内，占据了充气轮胎的气室的体积的50％至80％。
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公开(公告)号：US08154531B2
公开(公告)日：2012-04-10
申请号：US13137212
申请日：2011-07-28
Applicant: Hirohisa Takahashi , Satoru Ishibashi , Noriaki Tani , Sadayuki Ukishima , Satoru Takasawa , Kyuzo Nakamura , Haruhiko Yamamoto
Inventor： Hirohisa Takahashi , Satoru Ishibashi , Noriaki Tani , Sadayuki Ukishima , Satoru Takasawa , Kyuzo Nakamura , Haruhiko Yamamoto
IPC: G06F3/041
CPC classification number: G06F3/045
Abstract: A touch panel having high durability is provided. Either one or both of a display device and a flexible panel have island-shaped protective bodies formed on surfaces of electrode layers (upper electrode layer, lower electrode layer), and a transparent conductive film is exposed between the protective bodies. Since the protective bodies protrude highly from the surface of the transparent conductive film, when the flexible panel is pressed and the upper electrode and the lower electrode layer are brought into contact, a load to be applied to the transparent conductive film is reduced by the protective bodies, so that the transparent conductive film is not broken.
Abstract translation: 提供了具有高耐久性的触摸面板。 显示装置和柔性面板中的任一个或两者具有形成在电极层（上电极层，下电极层）的表面上的岛状保护体，并且在保护体之间露出透明导电膜。 由于保护体从透明导电膜的表面突出高度突出，当按压柔性面板并使上部电极和下部电极层接触时，通过保护性 使透明导电膜不破裂。
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公开(公告)号：US08031183B2
公开(公告)日：2011-10-04
申请号：US12814039
申请日：2010-06-11
Applicant: Hirohisa Takahashi , Satoru Ishibashi , Noriaki Tani , Sadayuki Ukishima , Satoru Takasawa , Kyuzo Nakamura , Haruhiko Yamamoto
Inventor： Hirohisa Takahashi , Satoru Ishibashi , Noriaki Tani , Sadayuki Ukishima , Satoru Takasawa , Kyuzo Nakamura , Haruhiko Yamamoto
IPC: G06F3/041
CPC classification number: G06F3/045
Abstract: A touch panel having high durability is provided. Either one or both of a display device and a flexible panel have island-shaped protective bodies formed on surfaces of electrode layers (upper electrode layer, lower electrode layer), and a transparent conductive film is exposed between the protective bodies. Since the protective bodies protrude highly from the surface of the transparent conductive film, when the flexible panel is pressed and the upper electrode and the lower electrode layer are brought into contact, a load to be applied to the transparent conductive film is reduced by the protective bodies, so that the transparent conductive film is not broken.
Abstract translation: 提供了具有高耐久性的触摸面板。 显示装置和柔性面板中的任一个或两者具有形成在电极层（上电极层，下电极层）的表面上的岛状保护体，并且在保护体之间露出透明导电膜。 由于保护体从透明导电膜的表面突出高度突出，当按压柔性面板并使上部电极和下部电极层接触时，通过保护性 使透明导电膜不破裂。
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