发明申请
US20100271878A1 INJECTION METHOD WITH SCHOTTKY SOURCE/DRAIN 有权
注射方法与肖特源/排水

INJECTION METHOD WITH SCHOTTKY SOURCE/DRAIN
摘要:
An injection method for non-volatile memory cells with a Schottky source and drain is described. Carrier injection efficiency is controlled by an interface characteristic of silicide and silicon. A Schottky barrier is modified by controlling an overlap of a gate and a source/drain and by controlling implantation, activation and/or gate processes.
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