公开(公告)号：US09018615B2

公开(公告)日：2015-04-28

申请号：US11833563

申请日：2007-08-03

申请人： Erh-Kun Lai ,  ChiaHua Ho ,  Kuang Yeu Hsieh

发明人： Erh-Kun Lai ,  ChiaHua Ho ,  Kuang Yeu Hsieh

IPC分类号： H01L47/00 ,  H01L45/00

CPC分类号： H01L45/16 ,  H01L45/06 ,  H01L45/1233 ,  H01L45/1273 ,  H01L45/144

摘要： A memory cell device, of the type that includes a memory material switchable between electrical property states by application of energy, includes first and second electrodes, a plug of memory material (such as phase change material) which is in electrical contact with the second electrode, and an electrically conductive film which is supported by a dielectric form and which is in electrical contact with the first electrode and with the memory material plug. The dielectric form is wider near the first electrode, and is narrower near the phase change plug. The area of contact of the conductive film with the phase change plug is defined in part by the geometry of the dielectric form over which the conductive film is formed. Also, methods for making the device include steps of constructing a dielectric form over a first electrode, and forming a conductive film over the dielectric form.

摘要翻译： 包括能够通过施加能量在电性能状态之间切换的存储材料的存储单元装置包括第一和第二电极，与第二电极电接触的存储材料（例如相变材料）插头 以及由电介质形式支撑并与第一电极和记忆材料塞电接触的导电膜。 电介质形式在第一电极附近较宽，在相变插头附近较窄。 导电膜与相变插塞的接触面积部分地由形成导电膜的电介质形状的几何形状限定。 此外，制造该器件的方法包括在第一电极上构建电介质形式，以及在电介质形式上形成导电膜的步骤。

公开(公告)号：US08587983B2

公开(公告)日：2013-11-19

申请号：US13281266

申请日：2011-10-25

申请人： ChiaHua Ho ,  Erh-Kun Lai ,  Kuang Yeu Hsieh

发明人： ChiaHua Ho ,  Erh-Kun Lai ,  Kuang Yeu Hsieh

IPC分类号： H01L45/00

CPC分类号： H01L45/1608 ,  H01L45/04 ,  H01L45/06 ,  H01L45/12 ,  H01L45/1233 ,  H01L45/144 ,  H01L45/146 ,  H01L45/1625

摘要： A bistable resistance random access memory is described for enhancing the data retention in a resistance random access memory member. A dielectric member, e.g. the bottom dielectric member, underlies the resistance random access memory member which improves the SET/RESET window in the retention of information. The deposition of the bottom dielectric member is carried out by a plasma-enhanced chemical vapor deposition or by high-density-plasma chemical vapor deposition. One suitable material for constructing the bottom dielectric member is a silicon oxide. The bistable resistance random access memory includes a bottom dielectric member disposed between a resistance random access member and a bottom electrode or bottom contact plug. Additional layers including a bit line, a top contact plug, and a top electrode disposed over the top surface of the resistance random access memory member. Sides of the top electrode and the resistance random access memory member are substantially aligned with each other.

摘要翻译： 描述了双稳态电阻随机存取存储器，用于增强电阻随机存取存储器件中的数据保持。 电介质构件，例如 底部电介质构件位于电阻随机存取存储器构件的下方，其改善了保留信息中的SET / RESET窗口。 底部电介质构件的沉积通过等离子体增强化学气相沉积或通过高密度 - 等离子体化学气相沉积来进行。 用于构造底部电介质构件的一种合适的材料是氧化硅。 双稳态随机存取存储器包括设置在电阻随机存取构件和底部电极或底部接触插塞之间的底部电介质构件。 附加层包括位线，顶部接触插塞和设置在电阻随机存取存储器构件顶表面上的顶部电极。 顶部电极和电阻随机存取存储器构件的侧面基本上彼此对准。

公开(公告)号：US08482052B2

公开(公告)日：2013-07-09

申请号：US12056489

申请日：2008-03-27

申请人： Hang-Ting Lue ,  Erh-Kun Lai

发明人： Hang-Ting Lue ,  Erh-Kun Lai

IPC分类号： H01L29/792 ,  H01L29/788

CPC分类号： H01L29/66833 ,  G11C16/0466 ,  G11C16/0483 ,  G11C16/0491 ,  H01L21/28282 ,  H01L27/115 ,  H01L27/11524 ,  H01L27/11529 ,  H01L27/11531 ,  H01L27/11551 ,  H01L27/11568 ,  H01L27/11578 ,  H01L29/792

摘要： Thin film transistor memory cells are stackable, and employ bandgap engineered tunneling layers in a junction free, NAND configuration, that can be arranged in 3D arrays. The memory cells have a channel region in a semiconductor strip formed on an insulating layer, a tunnel dielectric structure disposed above the channel region, the tunnel dielectric structure having a multilayer structure including at least one layer having a hole-tunneling barrier height lower than that at the interface with the channel region, a charge storage layer disposed above the tunnel dielectric structure, an insulating layer disposed above the charge storage layer, and a gate electrode disposed above the insulating layer.

摘要翻译： 薄膜晶体管存储单元是可堆叠的，并且采用无结构的NAND配置的带隙工程隧道层，其可以排列成3D阵列。 所述存储单元具有在绝缘层上形成的半导体条中的沟道区，设置在所述沟道区上方的隧道电介质结构，所述隧道电介质结构具有多层结构，所述多层结构包括至少一层具有低于空穴穿透势垒高度的层。 在与沟道区域的界面处，设置在隧道介电结构上方的电荷存储层，设置在电荷存储层上方的绝缘层和设置在绝缘层上方的栅电极。

公开(公告)号：US20120326265A1

公开(公告)日：2012-12-27

申请号：US13168753

申请日：2011-06-24

申请人： Erh-Kun Lai ,  Hsiang-Lan Lung ,  Edward Kiewra

发明人： Erh-Kun Lai ,  Hsiang-Lan Lung ,  Edward Kiewra

IPC分类号： H01L21/762 ,  H01L27/08 ,  B82Y99/00

CPC分类号： H01L27/1021 ,  H01L27/101

摘要： A memory device includes an access device including a first doped semiconductor region having a first conductivity type, and a second doped semiconductor region having a second conductivity type opposite the first conductivity type. Both the first and the second doped semiconductor regions are formed in a single-crystalline semiconductor body, and define a p-n junction between them. The first and second doped semiconductor regions are implemented in isolated parallel ridges formed in the single-crystal semiconductor body. Each ridge is crenellated, and the crenellations define semiconductor islands; the first doped semiconductor region occupies a lower portion of the islands and an upper part of the ridge, and the second doped semiconductor region occupies an upper portion of the islands, so that the p-n junctions are defined within the islands.

摘要翻译： 存储器件包括一个存取器件，它包括具有第一导电类型的第一掺杂半导体区域和具有与第一导电类型相反的第二导电类型的第二掺杂半导体区域。 第一掺杂半导体区域和第二掺杂半导体区域均形成在单晶半导体本体中，并且在它们之间限定p-n结。 第一和第二掺杂半导体区域被实现在形成在单晶半导体本体中的隔离的平行脊中。 每个山脊都是锯齿状的，扇形界定半岛; 第一掺杂半导体区域占据岛的下部和脊的上部，并且第二掺杂半导体区占据岛的上部，从而在岛内限定p-n结。

公开(公告)号：US08324681B2

公开(公告)日：2012-12-04

申请号：US13162386

申请日：2011-06-16

申请人： Erh-Kun Lai ,  Hang-Ting Lue ,  Kuang Yeu Hsieh

发明人： Erh-Kun Lai ,  Hang-Ting Lue ,  Kuang Yeu Hsieh

IPC分类号： H01L29/792

CPC分类号： H01L21/28282 ,  H01L21/8221 ,  H01L21/84 ,  H01L27/0688 ,  H01L27/115 ,  H01L27/11568 ,  H01L27/11578 ,  H01L27/1203 ,  H01L29/792

摘要： A stacked non-volatile memory device comprises a plurality of bit line and word line layers stacked on top of each other. The bit line layers comprise a plurality of bit lines that can be formed using advanced processing techniques making fabrication of the device efficient and cost effective. The device can be configured for NAND operation.

摘要翻译： 堆叠的非易失性存储器件包括堆叠在彼此顶部的多个位线和字线层。 位线层包括多个位线，其可以使用先进的处理技术形成，从而使器件的制造成本高效且成本有效。 该器件可以配置为NAND操作。

公开(公告)号：US08274065B2

公开(公告)日：2012-09-25

申请号：US12581219

申请日：2009-10-19

申请人： Kuo-Pin Chang ,  Erh-Kun Lai

发明人： Kuo-Pin Chang ,  Erh-Kun Lai

IPC分类号： H01L29/10 ,  H01L21/00

CPC分类号： G11C11/5685 ,  G11C13/0007 ,  H01L45/04 ,  H01L45/1233 ,  H01L45/146 ,  H01L45/1633

摘要： A memory, comprising a metal portion, a first metal layer and second metal oxide layer is provided. The first metal oxide layer is on the metal portion, and the first metal oxide layer includes N resistance levels. The second metal oxide layer is on the first metal oxide layer, and the second metal oxide layer includes M resistance levels. The memory has X resistance levels and X is less than the summation of M and N, for minimizing a programming disturbance.

摘要翻译： 提供了包括金属部分，第一金属层和第二金属氧化物层的存储器。 第一金属氧化物层在金属部分上，第一金属氧化物层包括N电阻水平。 第二金属氧化物层在第一金属氧化物层上，第二金属氧化物层包括M电阻水平。 存储器具有X电阻电平，并且X小于M和N的总和，以最小化编程干扰。

公开(公告)号：US20120220111A1

公开(公告)日：2012-08-30

申请号：US13463264

申请日：2012-05-03

申请人： Yi-Hsuan Hsiao ,  Erh-Kun Lai ,  Hang-Ting Lue

发明人： Yi-Hsuan Hsiao ,  Erh-Kun Lai ,  Hang-Ting Lue

IPC分类号： H01L21/04

CPC分类号： H01L29/665 ,  G11C16/0408 ,  H01L29/40117 ,  H01L29/4234 ,  H01L29/66833 ,  H01L29/792

摘要： An injection method for non-volatile memory cells with a Schottky source and drain is described. Carrier injection efficiency is controlled by an interface characteristic of silicide and silicon. A Schottky barrier is modified by controlling an overlap of a gate and a source/drain and by controlling implantation, activation and/or gate processes.

摘要翻译： 描述了具有肖特基源和漏极的非易失性存储单元的注入方法。 载流子注入效率由硅化物和硅的界面特性控制。 通过控制栅极和源极/漏极的重叠以及通过控制注入，激活和/或栅极过程来修改肖特基势垒。

公开(公告)号：US20120037876A1

公开(公告)日：2012-02-16

申请号：US13281266

申请日：2011-10-25

申请人： ChiaHua Ho ,  Erh-Kun Lai ,  Kuang Yeu Hsieh

发明人： ChiaHua Ho ,  Erh-Kun Lai ,  Kuang Yeu Hsieh

IPC分类号： H01L45/00

CPC分类号： H01L45/1608 ,  H01L45/04 ,  H01L45/06 ,  H01L45/12 ,  H01L45/1233 ,  H01L45/144 ,  H01L45/146 ,  H01L45/1625

摘要： A bistable resistance random access memory is described for enhancing the data retention in a resistance random access memory member. A dielectric member, e.g. the bottom dielectric member, underlies the resistance random access memory member which improves the SET/RESET window in the retention of information. The deposition of the bottom dielectric member is carried out by a plasma-enhanced chemical vapor deposition or by high-density-plasma chemical vapor deposition. One suitable material for constructing the bottom dielectric member is a silicon oxide. The bistable resistance random access memory includes a bottom dielectric member disposed between a resistance random access member and a bottom electrode or bottom contact plug. Additional layers including a bit line, a top contact plug, and a top electrode disposed over the top surface of the resistance random access memory member. Sides of the top electrode and the resistance random access memory member are substantially aligned with each other.

摘要翻译： 描述了双稳态电阻随机存取存储器，用于增强电阻随机存取存储器件中的数据保持。 电介质构件，例如 底部介电构件位于电阻随机存取存储器构件的下方，其改善了保持信息中的SET / RESET窗口。 底部电介质构件的沉积通过等离子体增强化学气相沉积或通过高密度 - 等离子体化学气相沉积来进行。 用于构造底部电介质构件的一种合适的材料是氧化硅。 双稳态随机存取存储器包括设置在电阻随机存取构件和底部电极或底部接触插塞之间的底部电介质构件。 附加层包括位线，顶部接触插塞和设置在电阻随机存取存储器构件顶表面上的顶部电极。 顶部电极和电阻随机存取存储器构件的侧面基本上彼此对准。

公开(公告)号：US08114715B2

公开(公告)日：2012-02-14

申请号：US12654810

申请日：2010-01-05

申请人： Ming-Daou Lee ,  Chia-Hua Ho ,  Erh-Kun Lai ,  Kuang-Yeu Hsieh

发明人： Ming-Daou Lee ,  Chia-Hua Ho ,  Erh-Kun Lai ,  Kuang-Yeu Hsieh

IPC分类号： H01L21/82

CPC分类号： H01L45/04 ,  H01L45/1233 ,  H01L45/1246 ,  H01L45/146 ,  H01L45/1633

摘要： A resistive random access memory including, an insulating layer, a hard mask layer, a bottom electrode, a memory cell and a top electrode is provided. The insulating layer is disposed on the bottom electrode. The insulating layer has a contact hole having a first width. The hard mask layer has an opening. A portion of the memory cell is exposed from the opening and has a second width smaller than the first width. The top electrode is disposed on the insulating layer and is coupled with the memory cell.

摘要翻译： 提供了包括绝缘层，硬掩模层，底电极，存储单元和顶电极的电阻随机存取存储器。 绝缘层设置在底部电极上。 绝缘层具有第一宽度的接触孔。 硬掩模层具有开口。 存储单元的一部分从开口露出并且具有小于第一宽度的第二宽度。 顶部电极设置在绝缘层上并与存储单元耦合。

公开(公告)号：US08110429B2

公开(公告)日：2012-02-07

申请号：US12558401

申请日：2009-10-02

申请人： ChiaHua Ho ,  Erh-Kun Lai ,  Kuang Yeu Hsieh

发明人： ChiaHua Ho ,  Erh-Kun Lai ,  Kuang Yeu Hsieh

IPC分类号： H01L21/00 ,  H01L45/00 ,  H01L21/441

CPC分类号： H01L45/04 ,  H01L27/2436 ,  H01L45/06 ,  H01L45/1226 ,  H01L45/144 ,  H01L45/146 ,  H01L45/147 ,  H01L45/16

摘要： A resistance random access memory in a bridge structure is disclosed that comprises a contact structure where first and second electrodes are located within the contact structure. The first electrode has a circumferential extending shape, such as an annular shape, surrounding an inner wall of the contact structure. The second electrode is located within an interior of the circumferential extending shape and separated from the first electrode by an insulating material. A resistance memory bridge is in contact with an edge surface of the first and second electrodes. The first electrode in the contact structure is connected to a transistor and the second electrode in the contact structure is connected to a bit line. A bit line is connected to the second electrode by a self-aligning process.

摘要翻译： 公开了一种桥结构中的电阻随机存取存储器，其包括其中第一和第二电极位于接触结构内的接触结构。 第一电极具有围绕接触结构的内壁的周向延伸形状，例如环形形状。 第二电极位于周向延伸形状的内部，并通过绝缘材料与第一电​​极分离。 电阻记忆桥与第一和第二电极的边缘表面接触。 接触结构中的第一电极连接到晶体管，并且接触结构中的第二电极连接到位线。 位线通过自对准工艺连接到第二电极。