发明申请
- 专利标题: Polishing Pad and Polishing Device
- 专利标题(中): 抛光垫和抛光装置
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申请号: US12550544申请日: 2009-08-31
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公开(公告)号: US20100273404A1公开(公告)日: 2010-10-28
- 发明人: Allen Chiu , Yu-Lung Jeng
- 申请人: Allen Chiu , Yu-Lung Jeng
- 优先权: TW098206871 20090424
- 主分类号: B24D3/00
- IPC分类号: B24D3/00 ; B24B7/20 ; B24B37/04 ; B24D17/00
摘要:
A polishing pad used in semiconductor polishing process is provided in the present invention and a pressure sensitive adhesive is used to couple the polishing pad. The polishing pad includes a substrate, and the substrate includes a polishing surface and a reverse surface corresponding to the polishing surface. The polishing pad is characterized by: a pressure sensitive adhesive formed on the reverse surface of the substrate and used to couple with a bottom layer, and the horizontal adhesion of the pressure sensitive adhesive is higher than the vertical adhesion of the pressure sensitive adhesive.
公开/授权文献
- US08277290B2 Polishing pad and polishing device 公开/授权日:2012-10-02
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