发明申请
US20100276656A1 Devices Comprising Carbon Nanotubes, And Methods Of Forming Devices Comprising Carbon Nanotubes
有权
包含碳纳米管的装置以及包含碳纳米管的成形装置的方法
- 专利标题: Devices Comprising Carbon Nanotubes, And Methods Of Forming Devices Comprising Carbon Nanotubes
- 专利标题(中): 包含碳纳米管的装置以及包含碳纳米管的成形装置的方法
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申请号: US12235244申请日: 2008-09-22
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公开(公告)号: US20100276656A1公开(公告)日: 2010-11-04
- 发明人: Nishant Sinha , Gurtej S. Sandhu , Eugene Marsh , Neil Greeley , John Smythe
- 申请人: Nishant Sinha , Gurtej S. Sandhu , Eugene Marsh , Neil Greeley , John Smythe
- 主分类号: H01L45/00
- IPC分类号: H01L45/00 ; H01L21/02
摘要:
Some embodiments include devices that contain bundles of CNTs. An undulating topography extends over the CNTs and within spaces between the CNTs. A global maximum lateral width is defined as the greatest lateral width of any of the spaces. A material is directly over the CNTs, with the material being a plurality of particles that have minimum cross-sectional equatorial widths exceeding the global maximum lateral width. Some embodiments include methods in which a plurality of crossed carbon nanotubes are formed over a semiconductor substrate. The CNTs form an undulating upper topography extending across the CNTs and within spaces between the CNTs. A global maximum lateral width is defined as the greatest lateral width of any of the spaces. A material is deposited over the CNTs, with the material being deposited as particles that have minimum cross-sectional equatorial widths exceeding the global maximum lateral width.
公开/授权文献
- US08034315B2 Methods of forming devices comprising carbon nanotubes 公开/授权日:2011-10-11