发明申请
- 专利标题: Integrated Circuits and Methods of Design and Manufacture Thereof
- 专利标题(中): 集成电路及其设计和制造方法
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申请号: US12839750申请日: 2010-07-20
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公开(公告)号: US20100276759A1公开(公告)日: 2010-11-04
- 发明人: Henning Haffner , Manfred Eller , Richard Lindsay
- 申请人: Henning Haffner , Manfred Eller , Richard Lindsay
- 主分类号: H01L27/088
- IPC分类号: H01L27/088 ; H01L27/02 ; G06F17/50 ; H01L21/64
摘要:
Integrated circuits and methods of manufacture and design thereof are disclosed. For example, a method of manufacturing includes using a first mask to pattern a gate material forming a plurality of first and second features. The first features form gate electrodes of the semiconductor devices, whereas the second features are dummy electrodes. Based on the location of these dummy electrodes, selected dummy electrodes are removed using a second mask. The use of the method provides greater flexibility in tailoring individual devices for different objectives.
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