发明申请
- 专利标题： MEMS MICROPHONE WITH CAVITY AND METHOD THEREFOR
- 专利标题（中）： 具有孔的MEMS麦克风及其方法
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申请号： US12432377申请日： 2009-04-29
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公开(公告)号： US20100276767A1公开(公告)日： 2010-11-04
- 发明人: Lianjun Liu , Douglas G. Mitchell
- 申请人： Lianjun Liu , Douglas G. Mitchell
- 主分类号： H01L29/84
- IPC分类号： H01L29/84 ; H01L21/26
摘要：
A device comprises a substrate, a micro electro-mechanical systems (MEMS) structure, and a dielectric film. The substrate has a first side and a second side, the second side opposite the first side. The MEMS structure is formed on the first side of the substrate. The cavity is formed in the substrate directly opposite the MEMS structure. The cavity has an opening formed on the second side. The dielectric film is attached to the second side of the substrate and completely covering the opening. In one embodiment, the MEMS structure is a diaphragm for a microphone. Another embodiment includes a method for forming the device.
公开/授权文献
- US08158492B2 MEMS microphone with cavity and method therefor 公开/授权日：2012-04-17
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