发明申请
US20100283031A1 BIOSENSOR USING NANODOT AND METHOD OF MANUFACTURING THE SAME
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使用NANODOT的生物传感器及其制造方法
- 专利标题： BIOSENSOR USING NANODOT AND METHOD OF MANUFACTURING THE SAME
- 专利标题（中）： 使用NANODOT的生物传感器及其制造方法
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申请号： US12240133申请日： 2008-09-29
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公开(公告)号： US20100283031A1公开(公告)日： 2010-11-11
- 发明人: Tae Youb KIM , Chil Seong Ah , Chang Geun Ahn , Han Young Yu , Jong Heon Yang , Moon Gyu Jang
- 申请人： Tae Youb KIM , Chil Seong Ah , Chang Geun Ahn , Han Young Yu , Jong Heon Yang , Moon Gyu Jang
- 申请人地址： KR Daejeon
- 专利权人： Electronics and Telecommunications Research Institute
- 当前专利权人： Electronics and Telecommunications Research Institute
- 当前专利权人地址： KR Daejeon
- 优先权： KR2007-127565 20071210
- 主分类号： H01L29/775
- IPC分类号： H01L29/775 ; H01L21/335
摘要：
A biosensor using a nanodot and a method of manufacturing the same are provided. A silicon nanowire can be formed by a CMOS process to reduce manufacturing costs. In addition, an electrically charged nanodot is coupled to a target molecule to be detected, in order to readily change conductivity of the silicon nanowire, thereby making it possible to implement a biosensor capable of providing good sensitivity and being manufactured at a low cost.
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