发明申请
US20100285633A1 NON VOLATILE MEMORY CELLS INCLUDING A FILAMENT GROWTH LAYER AND METHODS OF FORMING THE SAME
审中-公开
非挥发性记忆细胞,包括纤维生长层及其形成方法
- 专利标题: NON VOLATILE MEMORY CELLS INCLUDING A FILAMENT GROWTH LAYER AND METHODS OF FORMING THE SAME
- 专利标题(中): 非挥发性记忆细胞,包括纤维生长层及其形成方法
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申请号: US12841212申请日: 2010-07-22
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公开(公告)号: US20100285633A1公开(公告)日: 2010-11-11
- 发明人: Ming Sun , Xilin Peng , Haiwen Xi , Michael Xuefei Tang
- 申请人: Ming Sun , Xilin Peng , Haiwen Xi , Michael Xuefei Tang
- 申请人地址: US CA Scotts Valley
- 专利权人: SEAGATE TECHNOLOGY LLC
- 当前专利权人: SEAGATE TECHNOLOGY LLC
- 当前专利权人地址: US CA Scotts Valley
- 主分类号: H01L21/02
- IPC分类号: H01L21/02
摘要:
A non volatile memory cell that includes a first electrode; a variable resistive layer disposed on the first electrode; a filament growth layer disposed on the variable resistive layer, the filament growth layer including dielectric material and metal atoms; and a second electrode. In other embodiments, a memory array is disclosed that includes a plurality of non volatile memory cells, each non volatile memory cell including a first electrode; a variable resistive layer disposed on the first electrode; a filament growth layer disposed on the variable resistive layer, the filament growth layer including clusters of a first electrically conductive atomic component interspersed in an oxidized second atomic component; and a second electrode; at least one word line; and at least one bit line, wherein the word line is orthogonal to the bit line and each of the plurality of non volatile memory cells are operatively coupled to a word line and a bit line. In still other embodiments, methods are disclosed that include forming a non volatile memory cell include forming a first electrode; forming a variable resistive layer on the first electrode; depositing a two phase alloy layer on the variable resistive layer; converting the two phase alloy layer to a filament growth layer; and depositing a second electrode on the filament growth layer, thereby forming a non volatile memory cell.
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