Invention Application
US20100289125A1 ENHANCED ELECTROMIGRATION PERFORMANCE OF COPPER LINES IN METALLIZATION SYSTEMS OF SEMICONDUCTOR DEVICES BY SURFACE ALLOYING
审中-公开
通过表面合金在半导体器件的金属化系统中增强铜线的电化学性能
- Patent Title: ENHANCED ELECTROMIGRATION PERFORMANCE OF COPPER LINES IN METALLIZATION SYSTEMS OF SEMICONDUCTOR DEVICES BY SURFACE ALLOYING
- Patent Title (中): 通过表面合金在半导体器件的金属化系统中增强铜线的电化学性能
-
Application No.: US12769124Application Date: 2010-04-28
-
Publication No.: US20100289125A1Publication Date: 2010-11-18
- Inventor: Frank Feustel , Tobias Letz , Axel Preusse
- Applicant: Frank Feustel , Tobias Letz , Axel Preusse
- Priority: DE102009021488.7 20090515
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L21/441

Abstract:
In sophisticated semiconductor devices, the electromigration performance of copper metal lines at the top interface thereof may be enhanced by forming a copper alloy that is locally restricted to the interface. To this end, an appropriate alloy-forming species, such as aluminum, may be provided on the basis of a non-masked deposition process and may be subsequently removed by a non-masked etch process, wherein the characteristic of the resulting alloy may be adjusted during an intermediate heat treatment.
Information query
IPC分类: