Invention Application
US20100289125A1 ENHANCED ELECTROMIGRATION PERFORMANCE OF COPPER LINES IN METALLIZATION SYSTEMS OF SEMICONDUCTOR DEVICES BY SURFACE ALLOYING 审中-公开
通过表面合金在半导体器件的金属化系统中增强铜线的电化学性能

  • Patent Title: ENHANCED ELECTROMIGRATION PERFORMANCE OF COPPER LINES IN METALLIZATION SYSTEMS OF SEMICONDUCTOR DEVICES BY SURFACE ALLOYING
  • Patent Title (中): 通过表面合金在半导体器件的金属化系统中增强铜线的电化学性能
  • Application No.: US12769124
    Application Date: 2010-04-28
  • Publication No.: US20100289125A1
    Publication Date: 2010-11-18
  • Inventor: Frank FeustelTobias LetzAxel Preusse
  • Applicant: Frank FeustelTobias LetzAxel Preusse
  • Priority: DE102009021488.7 20090515
  • Main IPC: H01L23/48
  • IPC: H01L23/48 H01L21/441
ENHANCED ELECTROMIGRATION PERFORMANCE OF COPPER LINES IN METALLIZATION SYSTEMS OF SEMICONDUCTOR DEVICES BY SURFACE ALLOYING
Abstract:
In sophisticated semiconductor devices, the electromigration performance of copper metal lines at the top interface thereof may be enhanced by forming a copper alloy that is locally restricted to the interface. To this end, an appropriate alloy-forming species, such as aluminum, may be provided on the basis of a non-masked deposition process and may be subsequently removed by a non-masked etch process, wherein the characteristic of the resulting alloy may be adjusted during an intermediate heat treatment.
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