发明申请
- 专利标题: Web Substrate Deposition System
- 专利标题(中): 网页沉积系统
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申请号: US12466221申请日: 2009-05-14
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公开(公告)号: US20100291308A1公开(公告)日: 2010-11-18
- 发明人: Piero Sferlazzo , Martin Klein
- 申请人: Piero Sferlazzo , Martin Klein
- 申请人地址: US NY Plainview
- 专利权人: VEECO INSTRUMENTS INC.
- 当前专利权人: VEECO INSTRUMENTS INC.
- 当前专利权人地址: US NY Plainview
- 主分类号: B05D3/00
- IPC分类号: B05D3/00 ; C23C16/56 ; B05C9/12 ; C23C14/35
摘要:
A deposition system includes a drum for supporting a web substrate during deposition that defines a plurality of apertures in an outer surface for passing cooling gas. A gas manifold includes an input that is coupled to an output of a gas source and at least one output that is coupled to the plurality of apertures in the outer surface of the drum. The gas manifold provides gas to the plurality of apertures that flows between the outer surface of the drum and the web substrate, thereby increasing heat transfer from the web substrate to the drum. At least one deposition source is positioned so that material deposits on the web substrate.
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