发明申请
- 专利标题： PROCESS FOR PRODUCING LIQUID CRYSTAL DISPLAY DEVICE
- 专利标题（中）： 生产液晶显示装置的方法
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申请号： US12864179申请日： 2009-01-20
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公开(公告)号： US20100294650A1公开(公告)日： 2010-11-25
- 发明人: Hirohisa Takahashi , Satoru Ishibashi
- 申请人： Hirohisa Takahashi , Satoru Ishibashi
- 申请人地址： JP Chigasaki-shi
- 专利权人： ULVAC, INC.
- 当前专利权人： ULVAC, INC.
- 当前专利权人地址： JP Chigasaki-shi
- 优先权： JPP2008-013680 20080124
- 国际申请： PCT/JP2009/050781 WO 20090120
- 主分类号： C23C14/34
- IPC分类号： C23C14/34
摘要：
A process for producing a liquid crystal display device that includes at least a pair of substrates holding a liquid crystal layer therebetween and a pixel electrode superimposed on the liquid crystal layer side of the pair of substrates, the pixel electrode on at least one of the pair of substrates being formed of a transparent electroconductive film made of zinc oxide as a fundamental constituent material, the process includes: a step of forming a zinc oxide transparent electroconductive film on the substrate by sputtering, using a target of a zinc oxide series material to form the pixel electrode, wherein, in the step of forming the pixel electrode, sputtering is performed in an atmosphere containing two or three materials selected from the group consisting of hydrogen gas, oxygen gas, and water vapor.
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