发明申请
US20100294740A1 Directed self-assembly of block copolymers using segmented prepatterns
有权
使用分段预制图的嵌段共聚物的定向自组装
- 专利标题: Directed self-assembly of block copolymers using segmented prepatterns
- 专利标题(中): 使用分段预制图的嵌段共聚物的定向自组装
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申请号: US12468391申请日: 2009-05-19
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公开(公告)号: US20100294740A1公开(公告)日: 2010-11-25
- 发明人: Joy Cheng , Kafai Lai , Wai-Kin Li , Young-Hye Na , Charles Rettner , Daniel P. Sanders
- 申请人: Joy Cheng , Kafai Lai , Wai-Kin Li , Young-Hye Na , Charles Rettner , Daniel P. Sanders
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01B13/00
- IPC分类号: H01B13/00 ; B05D7/24 ; B05D3/00
摘要:
An opening in a substrate is formed, e.g., using optical lithography, with the opening having sidewalls whose cross section is given by segments that are contoured and convex. The cross section of the opening may be given by overlapping circular regions, for example. The sidewalls adjoin at various points, where they define protrusions. A layer of polymer including a block copolymer is applied over the opening and the substrate, and allowed to self-assemble. Discrete, segregated domains form in the opening, which are removed to form holes, which can be transferred into the underlying substrate. The positions of these domains and their corresponding holes are directed to predetermined positions by the sidewalls and their associated protrusions. The distances separating these holes may be greater or less than what they would be if the block copolymer (and any additives) were to self-assemble in the absence of any sidewalls.
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