Invention Application
US20100295058A1 TUNNELING FIELD EFFECT TRANSISTOR SWITCH DEVICE 有权
隧道场效应晶体管开关装置

  • Patent Title: TUNNELING FIELD EFFECT TRANSISTOR SWITCH DEVICE
  • Patent Title (中): 隧道场效应晶体管开关装置
  • Application No.: US12468612
    Application Date: 2009-05-19
  • Publication No.: US20100295058A1
    Publication Date: 2010-11-25
  • Inventor: Jin CHO
  • Applicant: Jin CHO
  • Applicant Address: KY Grand Cayman
  • Assignee: GLOBALFOUNDRIES INC.
  • Current Assignee: GLOBALFOUNDRIES INC.
  • Current Assignee Address: KY Grand Cayman
  • Main IPC: H01L31/0312
  • IPC: H01L31/0312
TUNNELING FIELD EFFECT TRANSISTOR SWITCH DEVICE
Abstract:
A tunneling field effect transistor (TFET) device includes a semiconductor substrate having a layer of relatively intermediate bandgap semiconductor material, a layer of relatively low bandgap semiconductor material overlying the layer of relatively intermediate bandgap semiconductor material, and a layer of relatively high bandgap semiconductor material overlying the layer of relatively low bandgap semiconductor material. The TFET device includes a source region, a drain region, and a channel region defined in the semiconductor substrate. The TFET device also has a gate structure overlying at least a portion of the channel region. The source region is highly doped with an impurity dopant having a first conductivity type, and the drain region is highly doped with an impurity dopant having a second conductivity type. The layer of relatively low bandgap semiconductor material promotes tunneling at a first junction between the source region and the channel region, and the layer of relatively high bandgap semiconductor material inhibits tunneling at a second junction between the source region and the channel region.
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