发明申请
US20100297797A1 MANUFACTURING METHOD OF AN ELECTRONIC DEVICE INCLUDING OVERMOLDED MEMS DEVICES
有权
包括过度MEMS器件的电子器件的制造方法
- 专利标题： MANUFACTURING METHOD OF AN ELECTRONIC DEVICE INCLUDING OVERMOLDED MEMS DEVICES
- 专利标题（中）： 包括过度MEMS器件的电子器件的制造方法
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申请号： US12848730申请日： 2010-08-02
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公开(公告)号： US20100297797A1公开(公告)日： 2010-11-25
- 发明人: Federico Giovanni Ziglioli , Mark Andrew Shaw
- 申请人： Federico Giovanni Ziglioli , Mark Andrew Shaw
- 申请人地址： IT Agrate Brianza
- 专利权人： STMICROELECTRONICS S.R.L.
- 当前专利权人： STMICROELECTRONICS S.R.L.
- 当前专利权人地址： IT Agrate Brianza
- 优先权： ITMI2007A002099 20071030
- 主分类号： H01L21/56
- IPC分类号： H01L21/56
摘要：
A method manufactures an electronic device comprising a MEMS device overmolded in a protective casing. The MEMS device includes an active surface wherein a portion of the MEMS device is integrated, and is sensitive, through a membrane, to chemical/physical variations of a fluid. Prior to the molding step, at least one resin layer is formed on at least one region overlying the active surface in correspondence with the membrane. After, at least one portion of at least one resin layer is removed from at least one region, so that in the region an opening is formed, through which the MEMS device is activated from the outside of the protective casing.
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