发明申请
US20100316954A1 MONOMER HAVING LACTONE SKELETON, POLYMER COMPOUND AND PHOTORESIST COMPOSITION
审中-公开
具有肌肤的单体,聚合物和光电组合物
- 专利标题: MONOMER HAVING LACTONE SKELETON, POLYMER COMPOUND AND PHOTORESIST COMPOSITION
- 专利标题(中): 具有肌肤的单体,聚合物和光电组合物
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申请号: US12918693申请日: 2009-01-21
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公开(公告)号: US20100316954A1公开(公告)日: 2010-12-16
- 发明人: Hiroshi Koyama , Mari Sumida , Hiroki Tanaka
- 申请人: Hiroshi Koyama , Mari Sumida , Hiroki Tanaka
- 优先权: JP2008-062550 20080312
- 国际申请: PCT/JP2009/000190 WO 20090121
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G03F7/004 ; C07D307/20 ; C08F24/00
摘要:
Disclosed is a novel monomer having a lactone skeleton, which is useful typically as a monomer component typically for a highly functional polymer, because, when the monomer is applied typically to a resist resin, the resin is satisfactory stable and resistant typically to chemicals, is highly soluble in organic solvents, and has improved hydrolyzability and/or water solubility after hydrolysis.The monomer having a lactone skeleton is represented by following Formula (1),wherein Ra represents a hydrogen atom, halogen atom, or substituted or unsubstituted alkyl group having 1 to 6 carbon atoms; R1 represents a group having a lactone skeleton; and Y represents a bivalent organic group having 1 to 6 carbon atoms.
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