发明申请
- 专利标题: FLUID CONTROLLER
- 专利标题(中): 流体控制器
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申请号: US12449375申请日: 2008-01-30
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公开(公告)号: US20100320408A1公开(公告)日: 2010-12-23
- 发明人: Tomohiro Nakata , Michio Yamaji , Tsutomu Shinohara , Akihiro Harada
- 申请人: Tomohiro Nakata , Michio Yamaji , Tsutomu Shinohara , Akihiro Harada
- 申请人地址: JP Osaka-shi, Osaka
- 专利权人: FUJIKIN INCORPORATED
- 当前专利权人: FUJIKIN INCORPORATED
- 当前专利权人地址: JP Osaka-shi, Osaka
- 优先权: JP2007-026647 20070206
- 国际申请: PCT/JP2008/051349 WO 20080130
- 主分类号: F16K1/54
- IPC分类号: F16K1/54
摘要:
The present invention provides a fluid controller which enables fine adjustments of low flow rates and enables a user to set desired low flow rates. Low-flow-rate piston stop-position setting means 12, which sets a position at which a low-flow-rate piston stops in upward movement thereof, includes: a low-flow-rate control screw 31 which is screwed in a through screw hole 15a provided in the top wall 15 of a casing 4 in such a way as to provide a gap between itself and the upper end surface of a valve rod 5, a tapered portion 32 provided at the tip end portion of the low-flow-rate control screw 31, a stopper piston 33 which has, in an upper surface thereof, a tapered portion 34 facing to the tapered portion 32 with a predetermined interval interposed therebetween and also has a lower surface 33a for restricting the upper position at which the low-flow-rate piston 8 stops, and a plurality of force transmission spherical members 35 which are interposed between the tapered portion 32 of the low-flow-rate control screw 31 and the tapered portion 34 of the stopper piston 33 for transmitting force therebetween.
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