发明申请
- 专利标题： WAFER CENTER FINDING WITH A KALMAN FILTER
- 专利标题（中）： 用KALMAN过滤器发现WAFER CENTER
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申请号： US12875462申请日： 2010-09-03
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公开(公告)号： US20100324732A1公开(公告)日： 2010-12-23
- 发明人: Christopher C. Kiley , Peter van der Meulen , Forrest T. Buzan , Paul E. Fogel
- 申请人： Christopher C. Kiley , Peter van der Meulen , Forrest T. Buzan , Paul E. Fogel
- 申请人地址： US MA Chelmsford
- 专利权人： BROOKS AUTOMATION, INC.
- 当前专利权人： BROOKS AUTOMATION, INC.
- 当前专利权人地址： US MA Chelmsford
- 主分类号： H01L21/68
- IPC分类号： H01L21/68 ; G06F19/00
摘要：
A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.
公开/授权文献
- US08270702B2 Wafer center finding with a Kalman filter 公开/授权日：2012-09-18
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