发明申请
- 专利标题： Scanning Probe Microscope and Method of Observing Sample Using the Same
- 专利标题（中）： 扫描探针显微镜及其使用方法
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申请号： US12864196申请日： 2008-12-18
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公开(公告)号： US20100325761A1公开(公告)日： 2010-12-23
- 发明人: Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
- 申请人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
- 申请人地址： JP Chiyoda-ku, Tokyo
- 专利权人： Hitachi, Ltd.
- 当前专利权人： Hitachi, Ltd.
- 当前专利权人地址： JP Chiyoda-ku, Tokyo
- 优先权： JP2008-054245 20080305; JP2008-252097 20080930
- 国际申请： PCT/JP2008/073074 WO 20081218
- 主分类号： G01Q60/24
- IPC分类号： G01Q60/24
摘要：
Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.