发明申请
US20100325761A1 Scanning Probe Microscope and Method of Observing Sample Using the Same 有权
扫描探针显微镜及其使用方法

Scanning Probe Microscope and Method of Observing Sample Using the Same
摘要:
Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
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