发明申请
- 专利标题: Scanning Probe Microscope and Method of Observing Sample Using the Same
- 专利标题(中): 扫描探针显微镜及其使用方法
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申请号: US12864196申请日: 2008-12-18
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公开(公告)号: US20100325761A1公开(公告)日: 2010-12-23
- 发明人: Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
- 申请人: Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
- 申请人地址: JP Chiyoda-ku, Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JP Chiyoda-ku, Tokyo
- 优先权: JP2008-054245 20080305; JP2008-252097 20080930
- 国际申请: PCT/JP2008/073074 WO 20081218
- 主分类号: G01Q60/24
- IPC分类号: G01Q60/24
摘要:
Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
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