发明申请
US20100327891A1 METHOD AND APPARATUS FOR THERMALLY CONDITIONING PROBE CARDS 有权
用于热调制探针卡的方法和装置

  • 专利标题: METHOD AND APPARATUS FOR THERMALLY CONDITIONING PROBE CARDS
  • 专利标题(中): 用于热调制探针卡的方法和装置
  • 申请号: US12492177
    申请日: 2009-06-26
  • 公开(公告)号: US20100327891A1
    公开(公告)日: 2010-12-30
  • 发明人: Eric D. Hobbs
  • 申请人: Eric D. Hobbs
  • 申请人地址: US CA Livermore
  • 专利权人: FormFactor, Inc.
  • 当前专利权人: FormFactor, Inc.
  • 当前专利权人地址: US CA Livermore
  • 主分类号: G01R31/02
  • IPC分类号: G01R31/02
METHOD AND APPARATUS FOR THERMALLY CONDITIONING PROBE CARDS
摘要:
Embodiments of probe cards and methods for fabricating and using same are provided herein. In some embodiments, an apparatus for testing a device (DUT) may include a probe card configured for testing a DUT; a thermal management apparatus disposed on the probe card to heat and/or cool the probe card; a sensor disposed on the probe card and coupled to the thermal management apparatus to provide data to the thermal management apparatus corresponding to a temperature of a location of the probe card; a first connector disposed on the probe card and coupled to the thermal management apparatus for connecting to a first power source internal to a tester; and a second connector, different than the first connector, disposed on the probe card and coupled to the thermal management apparatus for connecting to a second power source external to the tester.
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