发明申请
- 专利标题: METHOD AND APPARATUS FOR THERMALLY CONDITIONING PROBE CARDS
- 专利标题(中): 用于热调制探针卡的方法和装置
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申请号: US12492177申请日: 2009-06-26
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公开(公告)号: US20100327891A1公开(公告)日: 2010-12-30
- 发明人: Eric D. Hobbs
- 申请人: Eric D. Hobbs
- 申请人地址: US CA Livermore
- 专利权人: FormFactor, Inc.
- 当前专利权人: FormFactor, Inc.
- 当前专利权人地址: US CA Livermore
- 主分类号: G01R31/02
- IPC分类号: G01R31/02
摘要:
Embodiments of probe cards and methods for fabricating and using same are provided herein. In some embodiments, an apparatus for testing a device (DUT) may include a probe card configured for testing a DUT; a thermal management apparatus disposed on the probe card to heat and/or cool the probe card; a sensor disposed on the probe card and coupled to the thermal management apparatus to provide data to the thermal management apparatus corresponding to a temperature of a location of the probe card; a first connector disposed on the probe card and coupled to the thermal management apparatus for connecting to a first power source internal to a tester; and a second connector, different than the first connector, disposed on the probe card and coupled to the thermal management apparatus for connecting to a second power source external to the tester.
公开/授权文献
- US08400173B2 Method and apparatus for thermally conditioning probe cards 公开/授权日:2013-03-19