发明申请
- 专利标题: X-RAY INSPECTING APPARATUS AND X-RAY INSPECTING METHOD
- 专利标题(中): X射线检测装置和X射线检测方法
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申请号: US12810773申请日: 2008-12-25
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公开(公告)号: US20100329532A1公开(公告)日: 2010-12-30
- 发明人: Masayuki Masuda , Noriyuki Kato , Shinji Sugita , Tsuyoshi Matsunami , Yasushi Sasaki
- 申请人: Masayuki Masuda , Noriyuki Kato , Shinji Sugita , Tsuyoshi Matsunami , Yasushi Sasaki
- 专利权人: OMRON CORPORATION
- 当前专利权人: OMRON CORPORATION
- 优先权: JP2007-337572 20071227; JP2008-065187 20080314
- 国际申请: PCT/JP2008/073587 WO 20081225
- 主分类号: G06K9/00
- IPC分类号: G06K9/00 ; G01B15/06
摘要:
An X-ray inspecting apparatus capable of high-speed inspection of a prescribed inspection area of an object of inspection is provided. The X-ray inspecting apparatus includes: a scanning X-ray source for outputting X-ray; an X-ray detector driving unit on which a plurality of X-ray detectors are mounted, and capable of driving the plurality of X-ray detectors independently; and an image acquisition control mechanism controlling acquisition of image data by X-ray detector driving unit and X-ray detectors. A scanning X-ray source emits X-ray while moving the X-ray focal point of the X-ray source to each of X-ray emission originating positions set for each X-ray detector such that the X-ray passes through a prescribed inspection area of an object of inspection and enters each X-ray detector. Image pick-up by some of the X-ray detectors and movement of other X-ray detectors to an image pick-up position are executed in parallel and alternately. An image acquisition control unit acquires the image data picked-up by X-ray detectors, and a computing unit reconstructs an image in the inspection area based on the image data.
公开/授权文献
- US08391581B2 X-ray inspecting apparatus and X-ray inspecting method 公开/授权日:2013-03-05
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