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公开(公告)号：US08391581B2
公开(公告)日：2013-03-05
申请号：US12810773
申请日：2008-12-25
CPC分类号： G01N23/046 , A61B6/466 , G01N2223/3302 , G01N2223/419 , G01N2223/6113 , G01T1/2985
摘要： An X-ray inspecting apparatus capable of high-speed inspection of a prescribed inspection area of an object of inspection is provided. The X-ray inspecting apparatus includes: a scanning X-ray source for outputting X-ray; an X-ray detector driving unit on which a plurality of X-ray detectors are mounted, and capable of driving the plurality of X-ray detectors independently; and an image acquisition control mechanism controlling acquisition of image data by X-ray detector driving unit and X-ray detectors. A scanning X-ray source emits X-ray while moving the X-ray focal point of the X-ray source to each of X-ray emission originating positions set for each X-ray detector such that the X-ray passes through a prescribed inspection area of an object of inspection and enters each X-ray detector. Image pick-up by some of the X-ray detectors and movement of other X-ray detectors to an image pick-up position are executed in parallel and alternately. An image acquisition control unit acquires the image data picked-up by X-ray detectors, and a computing unit reconstructs an image in the inspection area based on the image data.
摘要翻译： 提供能够高速检查检查对象的规定检查区域的X射线检查装置。 X射线检查装置包括：用于输出X射线的扫描X射线源; X射线检测器驱动单元，其上安装有多个X射线检测器，并且能够独立地驱动多个X射线检测器; 以及控制由X射线检测器驱动单元和X射线检测器获取图像数据的图像获取控制机构。 扫描X射线源在将X射线源的X射线焦点移动到为每个X射线检测器设定的X射线发射始发位置的X射线焦点之间发射X射线，使得X射线通过规定的 检查对象的检查区域，并进入每个X射线检测器。 一些X射线检测器的图像拾取器和其他X射线检测器的移动到图像拾取位置被并行和交替地执行。 图像获取控制单元获取由X射线检测器拾取的图像数据，并且计算单元基于图像数据重建检查区域中的图像。
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公开(公告)号：US20100329532A1
公开(公告)日：2010-12-30
申请号：US12810773
申请日：2008-12-25
CPC分类号： G01N23/046 , A61B6/466 , G01N2223/3302 , G01N2223/419 , G01N2223/6113 , G01T1/2985
摘要： An X-ray inspecting apparatus capable of high-speed inspection of a prescribed inspection area of an object of inspection is provided. The X-ray inspecting apparatus includes: a scanning X-ray source for outputting X-ray; an X-ray detector driving unit on which a plurality of X-ray detectors are mounted, and capable of driving the plurality of X-ray detectors independently; and an image acquisition control mechanism controlling acquisition of image data by X-ray detector driving unit and X-ray detectors. A scanning X-ray source emits X-ray while moving the X-ray focal point of the X-ray source to each of X-ray emission originating positions set for each X-ray detector such that the X-ray passes through a prescribed inspection area of an object of inspection and enters each X-ray detector. Image pick-up by some of the X-ray detectors and movement of other X-ray detectors to an image pick-up position are executed in parallel and alternately. An image acquisition control unit acquires the image data picked-up by X-ray detectors, and a computing unit reconstructs an image in the inspection area based on the image data.
摘要翻译： 提供能够高速检查检查对象的规定检查区域的X射线检查装置。 X射线检查装置包括：用于输出X射线的扫描X射线源; X射线检测器驱动单元，其上安装有多个X射线检测器，并且能够独立地驱动多个X射线检测器; 以及控制由X射线检测器驱动单元和X射线检测器获取图像数据的图像获取控制机构。 扫描X射线源在将X射线源的X射线焦点移动到为每个X射线检测器设定的X射线发射始发位置的X射线焦点之间发射X射线，使得X射线通过规定的 检查对象的检查区域，并进入每个X射线检测器。 一些X射线检测器的图像拾取器和其他X射线检测器的移动到图像拾取位置被并行和交替地执行。 图像获取控制单元获取由X射线检测器拾取的图像数据，并且计算单元基于图像数据重建检查区域中的图像。
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公开(公告)号：US08254519B2
公开(公告)日：2012-08-28
申请号：US13063253
申请日：2009-08-28
IPC分类号： A61B6/00
CPC分类号： G01N23/046 , G01N2223/419
摘要： An X-ray inspection apparatus includes a scanning X-ray source for emitting an X-ray, an X-ray detector drive unit having a plurality of X-ray detectors mounted thereon and being capable of independently driving the plurality of X-ray detectors, and an image acquisition control mechanism for controlling the X-ray detector drive unit and acquisition of image data from the X-ray detectors. The scanning X-ray source emits an X-ray by moving an X-ray focal point position of the X-ray source to each of originating point positions of X-ray emission, which are set for the X-ray detectors such that X-rays are transmitted through a plurality of prescribed inspection areas of an inspection object and enter the X-ray detectors. Image pickup by the X-ray detector and movement of another X-ray detector are concurrently performed in an alternate manner. The image acquisition control mechanism acquires image data, and an operation unit reconstructs an image.
摘要翻译： X射线检查装置包括用于发射X射线的扫描X射线源，安装有多个X射线检测器的X射线检测器驱动单元，能够独立地驱动多个X射线检测器 以及用于控制X射线检测器驱动单元并从X射线检测器获取图像数据的图像获取控制机构。 扫描X射线源通过将X射线源的X射线焦点位置移动到针对X射线检测器设定的X射线发射的每个起始点位置而发射X射线，使得X 射线通过检查对象的多个规定的检查区域传送并进入X射线检测器。 通过X射线检测器进行的图像拾取和另一X射线检测器的移动以交替的方式同时进行。 图像获取控制机构获取图像数据，并且操作单元重建图像。
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公开(公告)号：US20110243299A1
公开(公告)日：2011-10-06
申请号：US13063253
申请日：2009-08-28
IPC分类号： G01N23/04
CPC分类号： G01N23/046 , G01N2223/419
摘要： An X-ray inspection apparatus includes a scanning X-ray source for emitting an X-ray, an X-ray detector drive unit having a plurality of X-ray detectors mounted thereon and being capable of independently driving the plurality of X-ray detectors, and an image acquisition control mechanism for controlling the X-ray detector drive unit and acquisition of image data from the X-ray detectors. The scanning X-ray source emits an X-ray by moving an X-ray focal point position of the X-ray source to each of originating point positions of X-ray emission, which are set for the X-ray detectors such that X-rays are transmitted through a plurality of prescribed inspection areas of an inspection object and enter the X-ray detectors. Image pickup by the X-ray detector and movement of another X-ray detector are concurrently performed in an alternate manner. The image acquisition control mechanism acquires image data, and an operation unit reconstructs an image.
摘要翻译： X射线检查装置包括用于发射X射线的扫描X射线源，安装有多个X射线检测器的X射线检测器驱动单元，能够独立地驱动多个X射线检测器 以及用于控制X射线检测器驱动单元并从X射线检测器获取图像数据的图像获取控制机构。 扫描X射线源通过将X射线源的X射线焦点位置移动到针对X射线检测器设定的X射线发射的每个起始点位置而发射X射线，使得X 射线通过检查对象的多个规定的检查区域传送并进入X射线检测器。 通过X射线检测器进行的图像拾取和另一X射线检测器的移动以交替的方式同时进行。 图像获取控制机构获取图像数据，并且操作单元重建图像。
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公开(公告)号：US20110255660A1
公开(公告)日：2011-10-20
申请号：US13141003
申请日：2009-12-21
IPC分类号： G01N23/04
CPC分类号： G01N23/04 , G01N2223/6113
摘要： An X-ray inspection apparatus includes an X-ray source, an X-ray detector, an X-ray detector drive unit, an image acquisition control mechanism for controlling driving of the X-ray detector by the X-ray detector drive unit and acquisition of image data from the X-ray detector, an inspection object drive mechanism for moving an inspection object, an X-ray source control mechanism, and an operation unit. The X-ray source control mechanism causes the X-ray source to output an X-ray based on an instruction from the operation unit. The image acquisition control mechanism moves the X-ray detector to a plurality of image pickup positions aligned in the Y direction based on an instruction from the operation unit. The inspection object drive mechanism moves the inspection object in the Y direction such that the X-ray detector can detect an X-ray transmitted through the inspection object at each image pickup position based on an instruction from the operation unit.
摘要翻译： X射线检查装置包括X射线源，X射线检测器，X射线检测器驱动单元，用于通过X射线检测器驱动单元控制X射线检测器的驱动的图像获取控制机构，以及 从X射线检测器获取图像数据，用于移动检查对象的检查对象驱动机构，X射线源控制机构和操作单元。 X射线源控制机构使得X射线源基于来自操作单元的指令输出X射线。 图像获取控制机构基于来自操作单元的指示，将X射线检测器移动到在Y方向上排列的多个摄像位置。 检查对象驱动机构使检查对象沿Y方向移动，使得X射线检测器可以基于来自操作单元的指令检测在每个图像拾取位置处透过检查对象的X射线。
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公开(公告)号：US07680242B2
公开(公告)日：2010-03-16
申请号：US12047803
申请日：2008-03-13
IPC分类号： G01N23/00
摘要： An X-ray examination apparatus includes a scanning X-ray source for outputting X-rays, a sensor base which is attached with a plurality of X-ray sensors and which rotates about a rotation axis, and an image acquiring control mechanism for controlling rotation angle of the sensor base and acquisition of image data from the X-ray sensors. With respect to each X-ray sensor, the scanning X-ray source moves the X-ray focal position of the X-ray source to each starting position of the X-ray emission set so that the X-ray transmits through a predetermined examination area of an examination target and enters each X-ray sensor, and emits the X-rays. The image control acquiring control mechanism acquires image data detected by the X-ray sensors, and a calculation unit reconstructs an image of the examination area based on the image data.
摘要翻译： X射线检查装置包括：X射线输出用扫描X射线源，安装有多个X射线传感器并围绕旋转轴旋转的传感器基座;以及用于控制旋转的图像获取控制机构 传感器基座的角度和从X射线传感器采集图像数据。 对于每个X射线传感器，扫描X射线源将X射线源的X射线焦点位置移动到X射线发射组的每个起始位置，使得X射线透过预定检查 检查对象的区域并进入各X射线传感器，发射X射线。 图像控制获取控制机构获取由X射线传感器检测的图像数据，并且计算单元基于图像数据重建检查区域的图像。
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7.发明授权公开(公告)号：US07522709B2
公开(公告)日：2009-04-21
申请号：US12048852
申请日：2008-03-14
IPC分类号： G21K1/00
CPC分类号： H01J35/30 , A61B6/032 , A61B6/4028 , H05G1/26
摘要： An X-ray examination apparatus changes a position of each X-ray sensor by rotating a sensor base, and resets a starting position of X-ray emission that becomes a X-ray focal position so that the X-ray enters each X-ray sensor after the position thereof is changed. A scanning X-ray source deflects an electron beam to easily change the position where the electron beam impinges a target of the X-ray source to an arbitrary location. The irradiating position of the electron beam then can be easily moved according to an accumulated irradiation time on the target. Therefore, maintenance can be performed without interrupting the X-ray examination.
摘要翻译： X射线检查装置通过旋转传感器基座来改变每个X射线传感器的位置，并且将X射线焦点位置的X射线发射的起始位置复位，使得X射线进入每个X射线 传感器在其位置改变之后。 扫描X射线源偏转电子束以容易地改变电子束将X射线源的目标物照射到任意位置的位置。 然后，电子束的照射位置可以根据目标上累积的照射时间容易地移动。 因此，可以在不中断X射线检查的情况下进行维护。
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公开(公告)号：US20080226035A1
公开(公告)日：2008-09-18
申请号：US12048852
申请日：2008-03-14
IPC分类号： G21K1/00
CPC分类号： H01J35/30 , A61B6/032 , A61B6/4028 , H05G1/26
摘要： An X-ray examination apparatus changes a position of each X-ray sensor by rotating a sensor base, and resets a starting position of X-ray emission that becomes a X-ray focal position so that the X-ray enters each X-ray sensor after the position thereof is changed. A scanning X-ray source deflects an electron beam to easily change the position where the electron beam impinges a target of the X-ray source to an arbitrary location. The irradiating position of the electron beam then can be easily moved according to an accumulated irradiation time on the target. Therefore, maintenance can be performed without interrupting the X-ray examination.
摘要翻译： X射线检查装置通过旋转传感器基座来改变每个X射线传感器的位置，并且将X射线焦点位置的X射线发射的起始位置复位，使得X射线进入每个X射线 传感器在其位置改变之后。 扫描X射线源偏转电子束以容易地改变电子束将X射线源的目标物照射到任意位置的位置。 然后，电子束的照射位置可以根据目标上累积的照射时间容易地移动。 因此，可以在不中断X射线检查的情况下进行维护。
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公开(公告)号：US20110249795A1
公开(公告)日：2011-10-13
申请号：US13140971
申请日：2009-12-21
申请人： Shinji Sugita , Masayuki Masuda
发明人： Shinji Sugita , Masayuki Masuda
IPC分类号： G01N23/04
CPC分类号： G01N23/046 , G01N2223/419 , G01N2223/6113 , H01J35/08 , H01J35/14 , H01J2235/086
摘要： An X-ray inspection apparatus includes an X-ray source, an X-ray detector, an image acquisition control mechanism for controlling acquisition of image data from the X-ray detector, an inspection object drive mechanism for moving an inspection object, an X-ray source control mechanism, and an operation unit. The X-ray source control mechanism causes the X-ray source to output X-rays from focal point positions aligned in the X direction, based on an instruction from the operation unit. The inspection object is divided into a plurality of partial areas. The image acquisition control mechanism acquires a partial image which is an image of an X-ray output from each focal point position and transmitted through each partial area. When acquisition of partial images for all the focal point positions is finished, the inspection object drive mechanism moves the inspection object in the Y direction based on an instruction from the operation unit.
摘要翻译： X射线检查装置包括X射线源，X射线检测器，用于控制从X射线检测器获取图像数据的图像获取控制机构，用于移动检查对象的检查对象驱动机构，X 射源控制机构和操作单元。 X射线源控制机构使得X射线源基于来自操作单元的指令从X方向上的焦点位置输出X射线。 检查对象分为多个部分区域。 图像获取控制机构获取作为从每个焦点位置输出的X射线的图像的部分图像并通过每个局部区域发送。 当完成对所有焦点位置的部分图像的获取完成时，检查对象驱动机构基于来自操作单元的指令在Y方向上移动检查对象。
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公开(公告)号：US20110222647A1
公开(公告)日：2011-09-15
申请号：US13033862
申请日：2011-02-24
申请人： Shinji Sugita , Masayuki Masuda , Kiyoshi Murakami
发明人： Shinji Sugita , Masayuki Masuda , Kiyoshi Murakami
IPC分类号： G01N23/04
CPC分类号： G01N23/046 , G01N2223/419
摘要： The X-ray inspection apparatus and method realize high-speed defect analysis inspection. The processing executed by the X-ray inspection apparatus includes executing high-speed imaging, creating an inspection image by executing reconstruction processing, and performing automatic inspection. If the object has passed automatic inspection, the processing executed by the X-ray inspection apparatus includes displaying inspection results. If the object has failed automatic inspection, the processing executed by the X-ray inspection apparatus includes switching the imaging conditions and performing imaging for defect analysis, creating an image by executing reconstruction processing for defect analysis, and outputting the image for defect analysis.
摘要翻译： X射线检查装置和方法实现高速缺陷分析检查。 由X射线检查装置执行的处理包括执行高速成像，通过执行重建处理创建检查图像，并执行自动检查。 如果物体已通过自动检查，则由X射线检查装置执行的处理包括显示检查结果。 如果物体自动检查失败，则由X射线检查装置执行的处理包括切换成像条件并执行用于缺陷分析的成像，通过执行缺陷分析的重建处理并输出用于缺陷分析的图像来创建图像。
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