发明申请
US20100330395A1 Thin seeded Co/Ni multiplayer film with perpendicular anisotropy for read head sensor stabilization
有权
具有垂直各向异性的薄种子Co / Ni多层膜,用于读取头传感器稳定
- 专利标题: Thin seeded Co/Ni multiplayer film with perpendicular anisotropy for read head sensor stabilization
- 专利标题(中): 具有垂直各向异性的薄种子Co / Ni多层膜,用于读取头传感器稳定
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申请号: US12456935申请日: 2009-06-24
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公开(公告)号: US20100330395A1公开(公告)日: 2010-12-30
- 发明人: Kunliang Zhang , Min Li , Yuchen Zhou , Min Zheng
- 申请人: Kunliang Zhang , Min Li , Yuchen Zhou , Min Zheng
- 专利权人: Headway Technologies, Inc.
- 当前专利权人: Headway Technologies, Inc.
- 主分类号: G11B5/33
- IPC分类号: G11B5/33 ; B32B15/01 ; B05D3/02
摘要:
A hard bias (HB) structure for producing longitudinal bias to stabilize a free layer in an adjacent spin valve is disclosed and includes a composite seed layer made of at least Ta and a metal layer having a fcc(111) or hcp(001) texture to enhance perpendicular magnetic anisotropy (PMA) in an overlying (Co/Ni)X laminated layer. The (Co/Ni)X HB layer deposition involves low power and high Ar pressure to avoid damaging Co/Ni interfaces and thereby preserves PMA. A capping layer is formed on the HB layer to protect against etchants in subsequent process steps. After initialization, magnetization direction in the HB layer is perpendicular to the sidewalls of the spin valve and generates an Mrt value that is greater than from an equivalent thickness of CoPt. A non-magnetic metal separation layer may be formed on the capping layer and spin valve to provide an electrical connection between top and bottom shields.
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