发明申请
- 专利标题： HIGHLY EFFICIENT, CHARGE DEPLETION-MEDIATED, VOLTAGE-TUNABLE ACTUATION EFFICIENCY AND RESONANCE FREQUENCY OF PIEZOELECTRIC SEMICONDUCTOR NANOELECTROMECHANICAL SYSTEMS RESONATORS
- 专利标题（中）： 高效率，充电截止介质，压电致动效率和压电半导体纳米电子系统谐振器的谐振频率
-
申请号： US11830653申请日： 2007-07-30
-
公开(公告)号： US20110001392A1公开(公告)日： 2011-01-06
- 发明人: SOTIRIOS KONSTANTINOS MASMANIDIS , RASSUL BULATOVICH KARABALIN , MICHAEL L. ROUKES
- 申请人： SOTIRIOS KONSTANTINOS MASMANIDIS , RASSUL BULATOVICH KARABALIN , MICHAEL L. ROUKES
- 申请人地址： US CA Pasadena
- 专利权人： CALIFORNIA INSTITUTE OF TECHNOLOGY
- 当前专利权人： CALIFORNIA INSTITUTE OF TECHNOLOGY
- 当前专利权人地址： US CA Pasadena
- 主分类号： H01L41/107
- IPC分类号： H01L41/107
摘要：
A nanoelectromechanical systems (NEMS) device and method for using the device provide for a movable member that includes a region of low conductivity over which an electric field is developed. A region width is within a factor of ten (10) of a thickness of the NEMS device. The region is formed between a junction that incorporates piezoelectric material. A first voltage is applied across the region which alters a width of an active portion of the region thereby adjusting a movement of the movable member induced by a second voltage. The second voltage is applied across the region to produce a strain on the active portion of the region. The strain results in a defined movement of the movable member.
公开/授权文献
信息查询
IPC分类:
