发明申请
- 专利标题： HANDLE WAFER HAVING VIEWING WINDOWS
- 专利标题（中）： 带有查看窗口的手柄
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申请号： US12827171申请日： 2010-06-30
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公开(公告)号： US20110006400A1公开(公告)日： 2011-01-13
- 发明人: Jean-Charles SOURIAU , Stéphane Caplet
- 申请人： Jean-Charles SOURIAU , Stéphane Caplet
- 申请人地址： FR Paris
- 专利权人： Comm. á I'éner. atom. et aux énergies alter.
- 当前专利权人： Comm. á I'éner. atom. et aux énergies alter.
- 当前专利权人地址： FR Paris
- 优先权： FR0954779 20090709
- 主分类号： H01L29/00
- IPC分类号： H01L29/00 ; H01L21/02
摘要：
The invention relates to a method for making a handle wafer (20′) for microelectronic functional wafers, including at least one transparent window (22, 24) for viewing through the thickness of the handle wafer, this method including: a) the making of at least one cavity (21, 23) in said handle wafer, b) the formation of at least one viewing window in said cavity on an alignment or receiving surface.
公开/授权文献
- US08288841B2 Handle wafer having viewing windows 公开/授权日：2012-10-16
信息查询
IPC分类:
