发明申请
- 专利标题: SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THE SAME
- 专利标题(中): 半导体器件及其制造方法
-
申请号: US12885086申请日: 2010-09-17
-
公开(公告)号: US20110008943A1公开(公告)日: 2011-01-13
- 发明人: Koichi TOBA , Yasushi Ishii , Yoshiyuki Kawashima , Takashi Hashimoto , Kosuke Okuyama
- 申请人: Koichi TOBA , Yasushi Ishii , Yoshiyuki Kawashima , Takashi Hashimoto , Kosuke Okuyama
- 专利权人: RENESAS ELECTRONICS CORPORATION
- 当前专利权人: RENESAS ELECTRONICS CORPORATION
- 优先权: JP2007-168915 20070627
- 主分类号: H01L21/8239
- IPC分类号: H01L21/8239
摘要:
The present invention provides a technology capable of reducing an area occupied by a nonvolatile memory while improving the reliability of the nonvolatile memory. In a semiconductor device, the structure of a code flash memory cell is differentiated from that of a data flash memory cell. More specifically, in the code flash memory cell, a memory gate electrode is formed only over the side surface on one side of a control gate electrode to improve a reading speed. In the data flash memory cell, on the other hand, a memory gate electrode is formed over the side surfaces on both sides of a control gate electrode. By using a multivalued memory cell instead of a binary memory cell, the resulting data flash memory cell can have improved reliability while preventing deterioration of retention properties and reduce its area.
公开/授权文献
- US08278169B2 Semiconductor device and a method of manufacturing the same 公开/授权日:2012-10-02
信息查询
IPC分类: