Invention Application
US20110012103A1 METHOD OF MANUFACTURING VERTICALLY ALIGNED NANOTUBES, METHOD OF MANUFACTURING SENSOR STRUCTURE, AND SENSOR ELEMENT MANUFACTURED THEREBY 有权
制造垂直对准的纳米管的方法,制造传感器结构的方法和制造的传感器元件

METHOD OF MANUFACTURING VERTICALLY ALIGNED NANOTUBES, METHOD OF MANUFACTURING SENSOR STRUCTURE, AND SENSOR ELEMENT MANUFACTURED THEREBY
Abstract:
Provided is a method of manufacturing a sensor structure, where vertically-well-aligned nanotubes are formed and the sensor structure having an excellent performance can be manufactured at the room temperature at low cost by using the nanotubes. The method of manufacturing a sensor structure includes: (a) forming a lower electrode on a substrate; (b) forming an organic template having a pore structure on the lower electrode; (c) forming a metal oxide thin film in the organic template; (d) forming a metal oxide nanotube structure, in which nanotubes are vertically aligned and upper portions thereof are connected to each other, by removing the organic template through a dry etching method; and (e) forming an upper electrode on the upper portions of the nanotubes.
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