METHOD OF MANUFACTURING VERTICALLY ALIGNED NANOTUBES, METHOD OF MANUFACTURING SENSOR STRUCTURE, AND SENSOR ELEMENT MANUFACTURED THEREBY
    1.
    发明申请
    METHOD OF MANUFACTURING VERTICALLY ALIGNED NANOTUBES, METHOD OF MANUFACTURING SENSOR STRUCTURE, AND SENSOR ELEMENT MANUFACTURED THEREBY 有权
    制造垂直对准的纳米管的方法,制造传感器结构的方法和制造的传感器元件

    公开(公告)号:US20110012103A1

    公开(公告)日:2011-01-20

    申请号:US12647777

    申请日:2009-12-28

    CPC classification number: H01L21/02554 H01L21/0262 H01L21/02639

    Abstract: Provided is a method of manufacturing a sensor structure, where vertically-well-aligned nanotubes are formed and the sensor structure having an excellent performance can be manufactured at the room temperature at low cost by using the nanotubes. The method of manufacturing a sensor structure includes: (a) forming a lower electrode on a substrate; (b) forming an organic template having a pore structure on the lower electrode; (c) forming a metal oxide thin film in the organic template; (d) forming a metal oxide nanotube structure, in which nanotubes are vertically aligned and upper portions thereof are connected to each other, by removing the organic template through a dry etching method; and (e) forming an upper electrode on the upper portions of the nanotubes.

    Abstract translation: 提供一种制造传感器结构的方法,其中形成垂直良好排列的纳米管,并且可以通过使用纳米管以低成本在室温下制造具有优异性能的传感器结构。 制造传感器结构的方法包括:(a)在基板上形成下电极; (b)在下电极上形成具有孔结构的有机模板; (c)在有机模板中形成金属氧化物薄膜; (d)通过干蚀刻法除去有机模板,形成金属氧化物纳米管结构,其中纳米管垂直取向并且其上部彼此连接; 和(e)在纳米管的上部形成上部电极。

    NANOPOROUS MEMBRANE, PROCESS OF FABRICATING THE SAME AND DEVICE FOR CONTROLLED RELEASE OF BIOPHARMACEUTICALS COMPRISING THE SAME
    2.
    发明申请
    NANOPOROUS MEMBRANE, PROCESS OF FABRICATING THE SAME AND DEVICE FOR CONTROLLED RELEASE OF BIOPHARMACEUTICALS COMPRISING THE SAME 有权
    纳米膜,其制造方法和用于控制释放包含其的生物体的装置

    公开(公告)号:US20090208726A1

    公开(公告)日:2009-08-20

    申请号:US12132914

    申请日:2008-06-04

    Abstract: Provided are a nanoporous membrane including a support; a first separation layer with a plurality of first nano-sized pores and a first matrix; and a second separation layer having a plurality of second pores respectively corresponding to the plurality of first pores of the first separation layer and a second matrix, and formed on the first separation layer, wherein a density of the plurality of the first pores and the second pores is equal to or greater than 1010/cm2, and a diameter of each of the second pores is less than that of the corresponding first pore, a process of fabricating the same, and a device for a controlled release of biopharmaceuticals including the nanoporous membrane. The device for a controlled release of biopharmaceuticals including the nanoporous membrane can release biopharmaceuticals at a constant rate for a long period of time regardless of the concentration of the biopharmaceuticals including in pharmaceuticals, and high flex and selectivity.

    Abstract translation: 提供了包括支持体的纳米多孔膜; 具有多个第一纳米尺寸孔和第一矩阵的第一分离层; 以及第二分离层,其具有分别对应于所述第一分离层的多个第一孔的多个第二孔和第二基质,并且形成在所述第一分离层上,其中所述多个第一孔和所述第二孔的密度 孔等于或大于1010 / cm 2,并且每个第二孔的直径小于相应的第一孔的直径,其制造方法和用于控制释放包括纳米多孔膜的生物药物的装置 。 包括纳米多孔膜的生物药物的控制释放装置可以长时间地以恒定的速率释放生物药物,而不管包括在药物中的生物药物的浓度以及高的挠曲性和选择性。

    Method of manufacturing vertically aligned nanotubes, method of manufacturing sensor structure, and sensor element manufactured thereby
    5.
    发明授权
    Method of manufacturing vertically aligned nanotubes, method of manufacturing sensor structure, and sensor element manufactured thereby 有权
    制造垂直排列的纳米管的方法,制造传感器结构的方法和由此制造的传感器元件

    公开(公告)号:US08377730B2

    公开(公告)日:2013-02-19

    申请号:US12647777

    申请日:2009-12-28

    CPC classification number: H01L21/02554 H01L21/0262 H01L21/02639

    Abstract: Provided is a method of manufacturing a sensor structure, where vertically-well-aligned nanotubes are formed and the sensor structure having an excellent performance can be manufactured at the room temperature at low cost by using the nanotubes. The method of manufacturing a sensor structure includes: (a) forming a lower electrode on a substrate; (b) forming an organic template having a pore structure on the lower electrode; (c) forming a metal oxide thin film in the organic template; (d) forming a metal oxide nanotube structure, in which nanotubes are vertically aligned and upper portions thereof are connected to each other, by removing the organic template through a dry etching method; and (e) forming an upper electrode on the upper portions of the nanotubes.

    Abstract translation: 提供一种制造传感器结构的方法,其中形成垂直良好排列的纳米管,并且可以通过使用纳米管以低成本在室温下制造具有优异性能的传感器结构。 制造传感器结构的方法包括:(a)在基板上形成下电极; (b)在下电极上形成具有孔结构的有机模板; (c)在有机模板中形成金属氧化物薄膜; (d)通过干蚀刻法除去有机模板,形成金属氧化物纳米管结构,其中纳米管垂直取向并且其上部彼此连接; 和(e)在纳米管的上部形成上部电极。

    NANOPOROUS ANTIREFLECTION THIN FILM AND METHOD OF PRODUCING THE SAME USING BLOCK COPOLYMERS
    6.
    发明申请
    NANOPOROUS ANTIREFLECTION THIN FILM AND METHOD OF PRODUCING THE SAME USING BLOCK COPOLYMERS 审中-公开
    纳米抗菌薄膜及其制备方法使用嵌段共聚物

    公开(公告)号:US20110120970A1

    公开(公告)日:2011-05-26

    申请号:US11947857

    申请日:2007-11-30

    Abstract: Disclosed herein is a method of producing an antireflection thin film using a block copolymer and an antireflection thin film prepared by the method. Specifically, the present invention relates to a method of producing a nanoporous antireflection film by spin-coating using a block copolymer solution and subsequent processing and a preparation by the method. The antireflection film of the present invention is prepared by coating a substrate with a block copolymer and selectively removing at least one block in the coated block copolymer to produce a nanoporous thin film with a pore size of 5 to 100 nm. When the thin film is applied to a substrate, an antireflection substrate which has a very low reflectance within a broad range of wavelength can be prepared.

    Abstract translation: 本文公开了使用嵌段共聚物和通过该方法制备的抗反射薄膜制备抗反射薄膜的方法。 具体地说,本发明涉及通过使用嵌段共聚物溶液进行旋涂制造纳米多孔抗反射膜的方法以及后续处理和通过该方法的制备。 通过用嵌段共聚物涂布基材并选择性地除去涂布的嵌段共聚物中的至少一个嵌段以制备孔径为5至100nm的纳米多孔薄膜来制备本发明的抗反射膜。 当将薄膜施加到基板上时,可以制备在宽波长范围内具有非常低的反射率的抗反射基板。

    Nanoporous membrane, process of fabricating the same and device for controlled release of biopharmaceuticals comprising the same
    9.
    发明授权
    Nanoporous membrane, process of fabricating the same and device for controlled release of biopharmaceuticals comprising the same 有权
    纳米多孔膜,其制造方法和包含其的生物药物的控制释放装置

    公开(公告)号:US07935416B2

    公开(公告)日:2011-05-03

    申请号:US12132914

    申请日:2008-06-04

    Abstract: Provided are a nanoporous membrane including a support; a first separation layer with a plurality of first nano-sized pores and a first matrix; and a second separation layer having a plurality of second pores respectively corresponding to the plurality of first pores of the first separation layer and a second matrix, and formed on the first separation layer, wherein a density of the plurality of the first pores and the second pores is equal to or greater than 1010/cm2, and a diameter of each of the second pores is less than that of the corresponding first pore, a process of fabricating the same, and a device for a controlled release of biopharmaceuticals including the nanoporous membrane. The device for a controlled release of biopharmaceuticals including the nanoporous membrane can release biopharmaceuticals at a constant rate for a long period of time regardless of the concentration of the biopharmaceuticals including in pharmaceuticals, and high flex and selectivity.

    Abstract translation: 提供了包括支持体的纳米多孔膜; 具有多个第一纳米尺寸孔和第一矩阵的第一分离层; 以及第二分离层,其具有分别对应于所述第一分离层的多个第一孔的多个第二孔和第二基质,并且形成在所述第一分离层上,其中所述多个第一孔和所述第二孔的密度 孔等于或大于1010 / cm 2,并且每个第二孔的直径小于相应的第一孔的直径,其制造方法和用于控制释放包括纳米多孔膜的生物药物的装置 。 包括纳米多孔膜的生物药物的控制释放装置可以长时间地以恒定的速率释放生物药物,而不管包括在药物中的生物药物的浓度以及高的挠曲性和选择性。

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