发明申请
US20110013192A1 LOCALIZED SURFACE PLASMON RESONANCE SENSOR AND FABRICATION METHOD THEREOF
审中-公开
本地化表面等离子体共振传感器及其制造方法
- 专利标题: LOCALIZED SURFACE PLASMON RESONANCE SENSOR AND FABRICATION METHOD THEREOF
- 专利标题(中): 本地化表面等离子体共振传感器及其制造方法
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申请号: US12698076申请日: 2010-02-01
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公开(公告)号: US20110013192A1公开(公告)日: 2011-01-20
- 发明人: Chih-Chung Yang , Cheng-Yen Chen , Jyh-Yang Wang , Yen-Cheng Lu , Hung-Yu Tseng , Fu-Ji Tsai
- 申请人: Chih-Chung Yang , Cheng-Yen Chen , Jyh-Yang Wang , Yen-Cheng Lu , Hung-Yu Tseng , Fu-Ji Tsai
- 申请人地址: TW TAIPEI
- 专利权人: NATIONAL TAIWAN UNIVERSITY
- 当前专利权人: NATIONAL TAIWAN UNIVERSITY
- 当前专利权人地址: TW TAIPEI
- 优先权: TWTW098124051 20090716
- 主分类号: G01N21/55
- IPC分类号: G01N21/55 ; H01L31/18
摘要:
A method for forming a localized surface plasmon resonance (LSPR) sensor is disclosed, including providing a substrate, forming a metal thin film on the substrate and irradiating the metal thin film with a laser to form a plurality of metal nanoparticles, wherein the metal nanoparticles have a fixed orientation.
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