发明申请
- 专利标题: RESIST COMPOSITION AND PATTERN FORMING METHOD USING THE SAME
- 专利标题(中): 使用它的耐蚀组合物和图案形成方法
-
申请号: US12921354申请日: 2009-03-13
-
公开(公告)号: US20110014570A1公开(公告)日: 2011-01-20
- 发明人: Kazuyoshi Mizutani , Jiro Yokoyama , Shinichi Sugiyama
- 申请人: Kazuyoshi Mizutani , Jiro Yokoyama , Shinichi Sugiyama
- 申请人地址: JP Tokyo
- 专利权人: FUJIFILM CORPORATION
- 当前专利权人: FUJIFILM CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2008-066746 20080314
- 国际申请: PCT/JP2009/055543 WO 20090313
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/20
摘要:
A resist composition and a pattern forming method using the composition are provided, the resist composition including: (A) a resin that decomposes by an action of an acid to increase a solubility of the resin (A) in an alkali developer; (B) a compound capable of generating an acid upon irradiation with actinic rays or radiation; (C) a compound represented by formula (C1); and (D) a solvent: wherein n represents an integer of 1 to 6; w represents an integer of 1 to 6; p represents an integer of 1 to 6; m represents an integer of 1 to 6; Ra, Rb, Rc and Rd each independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group or an aralkyl group, provided that Ra and Rb may combine together to form a ring, and Rc and Rd may combine together to form a ring.
公开/授权文献
信息查询
IPC分类: