发明申请
US20110018091A1 FUSE LINK STRUCTURES USING FILM STRESS FOR PROGRAMMING AND METHODS OF MANUFACTURE
有权
使用电影应力进行编程的保险丝链接结构和制造方法
- 专利标题： FUSE LINK STRUCTURES USING FILM STRESS FOR PROGRAMMING AND METHODS OF MANUFACTURE
- 专利标题（中）： 使用电影应力进行编程的保险丝链接结构和制造方法
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申请号： US12508962申请日： 2009-07-24
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公开(公告)号： US20110018091A1公开(公告)日： 2011-01-27
- 发明人: Karl W. Barth , Jeffrey P. Gambino , Tom C. Lee , Kevin S. Petrarca
- 申请人： Karl W. Barth , Jeffrey P. Gambino , Tom C. Lee , Kevin S. Petrarca
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 主分类号： H01L23/525
- IPC分类号： H01L23/525 ; H01L21/768
摘要：
A method of forming a programmable fuse structure includes forming at least one shallow trench isolation (STI) in a substrate, forming an e-fuse over the at least one STI and depositing an interlevel dielectric (ILD) layer over the e-fuse. Additionally, the method includes removing at least a portion of the at least one STI under the e-fuse to provide an air gap below a portion of the e-fuse and removing at least a portion of the ILD layer over the e-fuse to provide the air gap above the portion of the e-fuse.