发明申请
- 专利标题： PLASMA PROCESSING APPARATUS USING TRANSMISSION ELECTRODE
- 专利标题（中）： 使用传输电极的等离子体处理设备
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申请号： US12709149申请日： 2010-02-19
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公开(公告)号： US20110030899A1公开(公告)日： 2011-02-10
- 发明人: Keizo SUZUKI , Masaru Izawa , Nobuyuki Negishi , Kenetsu Yokogawa , Kenji Maeda
- 申请人： Keizo SUZUKI , Masaru Izawa , Nobuyuki Negishi , Kenetsu Yokogawa , Kenji Maeda
- 优先权： JP2009-184776 20090807
- 主分类号： C23F1/08
- IPC分类号： C23F1/08 ; C23C16/00 ; C23C16/50
摘要：
At least a part of a discharging electromagnetic wave is introduced into a processing chamber via a transmission electrode which has characteristics to behave as a dielectric (electric insulator) for the discharging electromagnetic wave, and to behave as a material with electric conductivity for RF bias electromagnetic wave of electromagnetic wave of ion plasma oscillation.
公开/授权文献
- US2535472A Delayed-action zero set for parking time meters 公开/授权日：1950-12-26
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