发明申请
US20110033614A1 METHOD FOR MANUFACTURING OPTICAL WAVEGUIDE 有权
制造光波导的方法

METHOD FOR MANUFACTURING OPTICAL WAVEGUIDE
摘要:
An object is to manufacture an optical waveguide having low optical loss, by smoothing the surface of a core. To this end, a method for manufacturing an optical waveguide includes: a core-forming layer formation step of forming a core-forming layer of a photosensitive polymer on a surface of a lower cladding layer formed on a substrate; a smoothing step of smoothing the surface by lowering a surface viscosity thereof through a heat treatment of the core-forming layer; and a photocuring step of forming a core through selective exposure of the smoothed core-forming layer.
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