发明申请
- 专利标题: METHOD FOR MANUFACTURING OPTICAL WAVEGUIDE
- 专利标题(中): 制造光波导的方法
-
申请号: US12988401申请日: 2009-04-20
-
公开(公告)号: US20110033614A1公开(公告)日: 2011-02-10
- 发明人: Tohru Nakashiba , Shinji Hashimoto , Naoyuki Kondou
- 申请人: Tohru Nakashiba , Shinji Hashimoto , Naoyuki Kondou
- 申请人地址: JP Osaka
- 专利权人: PANASONIC ELECTRIC WORKS CO., LTD.
- 当前专利权人: PANASONIC ELECTRIC WORKS CO., LTD.
- 当前专利权人地址: JP Osaka
- 优先权: JP2008-114314 20080424
- 国际申请: PCT/JP2009/058215 WO 20090420
- 主分类号: G02B6/10
- IPC分类号: G02B6/10
摘要:
An object is to manufacture an optical waveguide having low optical loss, by smoothing the surface of a core. To this end, a method for manufacturing an optical waveguide includes: a core-forming layer formation step of forming a core-forming layer of a photosensitive polymer on a surface of a lower cladding layer formed on a substrate; a smoothing step of smoothing the surface by lowering a surface viscosity thereof through a heat treatment of the core-forming layer; and a photocuring step of forming a core through selective exposure of the smoothed core-forming layer.
公开/授权文献
- US08541050B2 Method for manufacturing optical waveguide 公开/授权日:2013-09-24
信息查询