发明申请
- 专利标题： Non-aggregating nanoparticles and the use thereof
- 专利标题（中）： 非聚集性纳米粒子及其用途
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申请号： US12583078申请日： 2009-08-13
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公开(公告)号： US20110039105A1公开(公告)日： 2011-02-17
- 发明人: Paul A. Zimmerman , Aristeidis Bakandritsos , Michael F. Zettel , Markos Trikeriotis , Robert Rodriguez , Emmanuel P. Giannelis , Woo Jin Bae , Christopher K. Ober
- 申请人： Paul A. Zimmerman , Aristeidis Bakandritsos , Michael F. Zettel , Markos Trikeriotis , Robert Rodriguez , Emmanuel P. Giannelis , Woo Jin Bae , Christopher K. Ober
- 主分类号： B32B5/16
- IPC分类号： B32B5/16
摘要：
The present invention relates generally to non-aggregating nanoparticles, including ligand capped metal oxide nanoparticles. Methods for their synthesis and methods for their use, for example, for improved immersion lithography processes, are also disclosed.
公开/授权文献
- US08124230B2 Non-aggregating nanoparticles and the use thereof 公开/授权日：2012-02-28
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