发明申请
- 专利标题: MEMS CONTROLLED OSCILLATOR
- 专利标题(中): MEMS控制振荡器
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申请号: US12938126申请日: 2010-11-02
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公开(公告)号: US20110043405A1公开(公告)日: 2011-02-24
- 发明人: Robert B. Reichenbach , Keith Aubin , Maxim Zalalutdinov , Jeevak M. Parpia , Harold G. Craighead
- 申请人: Robert B. Reichenbach , Keith Aubin , Maxim Zalalutdinov , Jeevak M. Parpia , Harold G. Craighead
- 申请人地址: US NY Ithaca
- 专利权人: Cornell Research Foundation, Inc.
- 当前专利权人: Cornell Research Foundation, Inc.
- 当前专利权人地址: US NY Ithaca
- 主分类号: H01Q3/00
- IPC分类号: H01Q3/00
摘要:
An array of micromechanical oscillators have different resonant frequencies based on their geometries. In one embodiment, a micromechanical oscillator has a resonant frequency defined by an effective spring constant that is modified by application of heat. In one embodiment, the oscillator is disc of material supported by a pillar of much smaller diameter than the disc. The periphery of the disc is heated to modify the resonant frequency (or equivalently the spring constant or stiffness) of the disc. Continuous control of the output phase and frequency may be achieved when the oscillator becomes synchronized with an imposed sinusoidal force of close frequency. The oscillator frequency can be detuned to produce an easily controlled phase differential between the injected signal and the oscillator feedback. A phased array radar may be produced using independent phase controllable oscillators.
公开/授权文献
- US08049580B2 MEMS controlled oscillator 公开/授权日:2011-11-01
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