Invention Application
- Patent Title: Drive laser for EUV light source
- Patent Title (中): 驱动激光用于EUV光源
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Application No.: US12927012Application Date: 2010-11-03
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Publication No.: US20110058588A1Publication Date: 2011-03-10
- Inventor: Alexander I. Ershov , Igor V. Fomenkov , Norbert R. Bowering , Jerzy R. Hoffman
- Applicant: Alexander I. Ershov , Igor V. Fomenkov , Norbert R. Bowering , Jerzy R. Hoffman
- Applicant Address: US CA San Diego
- Assignee: Cymer, Inc.
- Current Assignee: Cymer, Inc.
- Current Assignee Address: US CA San Diego
- Main IPC: H01S3/22
- IPC: H01S3/22 ; H01S3/00

Abstract:
A device is described herein which may comprise an oscillator having an oscillator cavity length, L0, and defining an oscillator path; and a multi-pass optical amplifier coupled with the oscillator to establish a combined optical cavity including the oscillator path, the combined cavity having a length, Lcombined, where Lcombined=(N+x)*L0, where “N” is an integer and “x” is a number between 0.4 and 0.6.
Public/Granted literature
- US08514486B2 Drive laser for EUV light source Public/Granted day:2013-08-20
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