Invention Application
US20110058588A1 Drive laser for EUV light source 有权
驱动激光用于EUV光源

Drive laser for EUV light source
Abstract:
A device is described herein which may comprise an oscillator having an oscillator cavity length, L0, and defining an oscillator path; and a multi-pass optical amplifier coupled with the oscillator to establish a combined optical cavity including the oscillator path, the combined cavity having a length, Lcombined, where Lcombined=(N+x)*L0, where “N” is an integer and “x” is a number between 0.4 and 0.6.
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