Invention Application
- Patent Title: PATTERN CHARACTERISTIC-DETECTION APPARATUS FOR PHOTOMASK AND PATTERN CHARACTERISTIC-DETECTION METHOD FOR PHOTOMASK
- Patent Title (中): 用于光电子的图案特征检测装置和图案特征检测方法
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Application No.: US12857906Application Date: 2010-08-17
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Publication No.: US20110058729A1Publication Date: 2011-03-10
- Inventor: Hiromu Inoue , Hiroyuki Ikeda , Eiji Sawa
- Applicant: Hiromu Inoue , Hiroyuki Ikeda , Eiji Sawa
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Priority: JP2009-208310 20090909
- Main IPC: G06K9/00
- IPC: G06K9/00

Abstract:
According to one embodiment, a pattern characteristic detection apparatus for a photomask includes a detection-data creating portion, a reference-data creating portion, an extracting portion, a first area-setting portion, a detecting portion and an collecting portion. The detection-data creating portion is configured to create detection data on the basis of an optical image of a pattern formed on a photomask. The reference-data creating portion is configured to create reference data of the pattern. The extracting portion is configured to extract a pattern for pattern characteristic detection and positional information of the extracted pattern. The first area-setting portion is configured to set an area where pattern characteristics are to be detected, and configured to extract a target pattern. The detecting portion is configured to detect pattern characteristics of the target pattern within the area. In addition, the collecting portion is configured to collect the detected pattern characteristics.
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