发明申请
- 专利标题: LARGE GRAIN SIZE CONDUCTIVE STRUCTURE FOR NARROW INTERCONNECT OPENINGS
- 专利标题(中): 用于窄幅互连开口的大粒度导电结构
-
申请号: US12560878申请日: 2009-09-16
-
公开(公告)号: US20110062587A1公开(公告)日: 2011-03-17
- 发明人: Chih-Chao Yang , Daniel C. Edelstein , Takeshi Nogami , Stephen M. Rossnagel
- 申请人: Chih-Chao Yang , Daniel C. Edelstein , Takeshi Nogami , Stephen M. Rossnagel
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L23/522
- IPC分类号: H01L23/522 ; H01L21/768
摘要:
An interconnect structure having reduced electrical resistance and a method of forming such an interconnect structure are provided. The interconnect structure includes a dielectric material including at least one opening therein. The at least one opening is filled with an optional barrier diffusion layer, a grain growth promotion layer, an agglomerated plating seed layer, an optional second plating seed layer a conductive structure. The conductive structure which includes a metal-containing conductive material, typically Cu, has a bamboo microstructure and an average grain size of larger than 0.05 microns. In some embodiments, the conductive structure includes conductive grains that have a (111) crystal orientation.
公开/授权文献
信息查询
IPC分类: