发明申请
- 专利标题: PIEZOELECTRIC ACTUATOR AND METHOD FOR PRODUCING THE SAME
- 专利标题(中): 压电致动器及其制造方法
-
申请号: US12954245申请日: 2010-11-24
-
公开(公告)号: US20110062830A1公开(公告)日: 2011-03-17
- 发明人: Martin Schröder , Manfred Weigl
- 申请人: Martin Schröder , Manfred Weigl
- 优先权: DE102005051289.5 20051026
- 主分类号: H01L41/083
- IPC分类号: H01L41/083 ; H01L41/22
摘要:
A method for producing a piezoelectric actuator has the following steps: providing a plurality of piezoelectric material layers (2) which can be assembled into a stack; applying electrode layers (3) each having a recess (4, 4′) to the plurality of piezoelectric material layers, such that an alternating sequence of piezoelectric material layers and electrode layers is formed in the stack, wherein electrode layers with a recess (4) in a first recess zone and electrode layers with a recess (4′) in a second recess zone which differs from the first recess zone are alternatingly formed in the stack; and providing a stress-relieving material (5) in the first and second recesses, the stress-relieving material exhibiting electrically insulating properties after the stack is sintered, and preventing the individual material layers from adhering to one another.
公开/授权文献
- US08132304B2 Method of manufacturing a piezoelectric actuator 公开/授权日:2012-03-13
信息查询
IPC分类: